激光干涉条纹特征提取及定中测量技术研究  

Research on Feature Extraction of Laser Interference Fringe and Centering Measurement Technology

作　　者：高铭锷 袁鹤 徐敏[2,3] 王军华 崔海龙 GAO Minge;YUAN He;XU Min;WANG Junhua;CUI Hailong(Academy for Engineering&Technology,Fudan University,Shanghai 200433,China;School of Information science and Technology,Fudan University,Shanghai 200438,China;Shanghai Ultra-Precision Optical Manufacturing Engineering Center,Shanghai 200438,China;Institute of Optoelectronics,Fudan University,Shanghai 200438,China;Institute of Machinery Manufacturing Technology,China Academy of Engineering Physics,Mianyang,Sichuan 621000,China)

机构地区：[1]复旦大学工程与应用技术研究院,上海200433 [2]复旦大学信息科学与工程学院,上海200438 [3]上海超精密光学制造工程技术研究中心,上海200438 [4]复旦大学光电研究院,上海200438 [5]中国工程物理研究院机械制造工艺研究所,四川绵阳621000

出　　处：《光子学报》2022年第2期301-308,共8页Acta Photonica Sinica

基　　金：科学挑战计划(No.JDZZ2016006-01);国家重点研发计划(No.2020YFB2007600)。

摘　　要：针对不透明非球面壳体翻转法测量厚度时,被测件翻转前后需要严格控制定中精度的问题,提出一种基于激光干涉的非接触定中测量技术。配合高精度中空气浮转台、调心调平机构,设计并搭建了一套双向激光干涉定中装置,分别采集翻转前后内外表面不同运动姿态的干涉图,并实时分析其动态特征。基于现代光电探测技术,提出对激光干涉条纹进行实时特征提取算法处理,大幅提高了激光干涉条纹的动态识别精度。对定中精度进行理论分析,并在实验中与确定精度的电感测微计比对验证,实验与理论结果一致,证明所提干涉定中装置及实时特征提取算法可以有效提高定中精度,其绝对误差可达0.424μm。使用所提干涉定中装置和特征提取算法成功测量了不透明非球面壳体翻转前后相对于气浮转台旋转轴的定中偏差,满足定中要求,为翻转法厚度测量精度提供了定位保障,提高了轮廓及厚度测量数据的准确性。Opaque aspherical shells are widely used in the fields of aerospace,military and communications.The thickness measurement is a key issue to ensure the manufacturing quality of such components.Since it is impossible to conduct micron-level non-destructive measurement of the thickness directly,the flipping measuring method is preferred to measure the inner and outer contours of the shell.The thickness is obtained indirectly through the inner and outer contours.In the flipping measuring method,the centering accuracy before and after the reversal should be guaranteed,which is of significance for specifying the relative positions between the double surfaces.Most of the existing centering measurement technologies are limited by accuracy or complicated structures.Focusing on these limitations,a non-contact centering measurement technology based on laser interference is proposed.The optical structure only consists of two sets of the same laser interference centering device while the measurement accuracy can reach sub-micron level.The specific implementation process is to independently design and set up a bidirectional laser interference centering device and assist the modern photoelectric detection technology and a real-time feature extraction algorithm for laser interference fringes.Finally,the high-precision centering measurement before and after the reversal is achieved.In conjunction with the high-precision hollow air bearing table and a centering and leveling device,a bidirectional laser interference centering device is designed and built to collect the interferograms of the inner and outer surface before and after the reversal.Two sets of the same laser interference centering device are performed up and down to realize the bidirectional centering measurement of the tested part,which can monitor the consistency and tilt of the tested part before and after the reversal.The laser interference centering device adopts the Kepler telescope system to realize the expansion and collimation of the laser beam.The edge stray l

关 键 词：干涉测量 特征提取 动态特征 实时分析 厚度测量 

分 类 号：O436.1[机械工程—光学工程]