基于光腔衰荡光谱法的水汽线形强度测量  

Measurement of Water Vapor Linear Intensity Based on Cavity Ring-Down Spectroscopy

作　　者：马路遥 马若梦 徐鸿 冯晓娟[2] 张金涛[2,3] 林鸿 MA Lu-yao;Ma Ruo-meng;XU Hong;FENG Xiao-juan;ZHANG Jin-tao;LIN Hong(College of Metrology&Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;Division of Thermophysics and Process Measurement,National Institute of Metrology,Beijing 100029,China;Zhengzhou Institute of Metrology,Zhengzhou,Henan 450001,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]中国计量科学研究院热工计量科学研究所,北京100029 [3]郑州计量先进技术研究院,河南郑州450001

出　　处：《计量学报》2022年第2期287-292,共6页Acta Metrologica Sinica

基　　金：国家自然科学基金(51976206)。

摘　　要：随着半导体芯片行业的迅速发展,对电子气体的要求也逐渐提高。半导体加工环境中的痕量水分会严重影响芯片的良率和可靠性。光腔衰荡光谱法是近年来发展的一种具有高灵敏度和准确性的痕量气体测量方法,线形强度是光谱法测量的重要参数。为测量痕量水分,建立了一套光腔衰荡光谱系统,测量了中心频率在7171.10491 cm^(-1)和7177.6565 cm^(-1)的吸收光谱,通过HTP(Hartmann-Tran profile)线形拟合得到线形强度,测量结果的相对标准不确定度优于1.8%,与HITRAN、HITEMP和GEISA数据库比较,相对偏差小于6%。With the rapid development of the semiconductor chip industry,the requirements for electronic gases have gradually increased.Trace moisture in the semiconductor processing environment will seriously affect the yield and reliability of the chip.Cavity ring-down spectroscopy is a trace gas measurement method with high sensitivity and accuracy developed in recent years,and the linear intensity is an important parameter for the measurement of spectroscopy.In order to measure the trace humidity,an optical cavity ring-down spectroscopy system for trace humidity measurement was established.The absorption spectra with the center frequencies at 7171.10491 cm^(-1) and 7177.6565 cm^(-1) were measured.The linear intensity was obtained by HTP(Hartmann-Tran profile)linear fitting.The relative standard uncertainty of the measurement result is better than 1.8%.Compared with HITRAN,HITEMP and GEISA databases,the relative deviation is less than 6%.

关 键 词：计量学 光腔衰荡光谱 痕量水分 电子气体 线形强度 

分 类 号：TB99[一般工业技术—计量学] TB973[机械工程—测试计量技术及仪器]