非球面光学元件面型检测技术研究进展与最新应用  

Advances in research and applications of optical aspheric surface metrology

作　　者：梁子健 杨甬英[1] 赵宏洋 刘圣安 LIANG Zi-jian;YANG Yong-ying;ZHAO Hong-yang;LIU Sheng-an(State Key Lab of Modern Optical Instrumentation,Zhejiang University,Hangzhou 310027,China)

机构地区：[1]浙江大学现代光学仪器国家重点实验室,浙江杭州310027

出　　处：《中国光学》2022年第2期161-186,共26页Chinese Optics

基　　金：国家自然科学基金资助项目(No.61627825)。

摘　　要：非球面光学元件,特别是其中的自由曲面元件,在设计自由度上相比于球面具有很大的优势,基于非球面构建的光学系统能够以简单的光机结构实现复杂的设计目的。面型检测技术是保障光学非球面加工精度的关键,针对不同种类的非球面以及非球面加工的不同阶段对检测指标要求的多样性,现已发展出了种类繁多的检测方法。本文回顾了非球面光学元件面型检测技术的发展历程,分非干涉法与干涉法两大类整理了常用的检测技术,介绍了各自的技术指标与适用条件、研究进展与应用情况。本文重点讨论了基于干涉方法的非球面精密检测技术,举例说明了非零位与零位两条技术路线下各检测方法的基本原理、光路结构与检测能力,对比分析了各方法的优缺点与适用范围,介绍了一些配套算法以及检测光路的精密调节方法。Optical Systems using aspheric components(especially for free-form ones)have remarkable ad-vantages over traditional spherical systems in that they can satisfy complicated requirements with simple op-tical-mechanical structures relying on abundant optional design parameters.Surface testing is an essential process for ensuring accuracy in manufacturing.Therefore,plenty of testing methods have been developed to meet varying testing demands of different types of surfaces at different stages in manufacturing.This paper summarizes the history of aspheric surface testing technology,classifies available techniques by whether they use interferometry,then introduces corresponding technical indexes,applicable conditions,research progress and applications.This paper highlights the high-precision interferometric methods,basic principles,optical layout and testing performances of every measurement method classified into Null and Non-null testing.The pros and cons of each method are compared,relative algorithms are introduced and precise adjustment meth-ods are discussed.

关 键 词：非球面检测 自由曲面检测 干涉检测 零位检测 非零位检测 

分 类 号：TN247[电子电信—物理电子学] TH741[机械工程—光学工程]