皮秒激光氧化铝陶瓷微孔加工工艺  

Processing Technology of Picosecond Laser Alumina Ceramic Micro-holes

作　　者：杜大明 曹明轩 甘宏海 吴勇华 王颖 王敏 刘浩 袁铭辉[3] DU Daming;CAO Mingxuan;GAN Honghai;WU Yonghua;WANG Ying;WANG Min;LIU Hao;YUAN Minghui(Department of Intelligent Manufacturing,Wuyi University,Jiangmen 529000,China;Guangdong Guangdong-Hongkong-Macao Greater Bay Area Hard Technology Innovation Research Institute,Guangzhou 510000,China;Department of Mechanical and Aerospace Engineering,The Hong Kong University of Science and Technology,Hongkong 999077,China)

机构地区：[1]五邑大学智能制造学部,广东江门529000 [2]广东粤港澳大湾区硬科技创新研究院,广东广州510000 [3]香港科技大学机械及航空航天工程系,中国香港999077

出　　处：《新技术新工艺》2022年第3期22-27,共6页New Technology & New Process

基　　金：广东省重点领域研发计划项目(2020B090922004)。

摘　　要：陶瓷基复合材料因其优异的散热性能、绝缘性、热膨胀系数和物理硬度等,适用于大功率电力电子模块、航空航天和军工电子等领域,但由于在传统加工过程中易出现崩边、层间撕裂等缺陷,且无法实现微孔加工,限制了其应用。针对氧化铝陶瓷高质量微孔加工的需求,采用红外皮秒激光作为光源对氧化铝陶瓷进行了打孔试验研究,分析了激光功率、离焦量和扫描速度等工艺参数对微孔锥度、热影响区和重铸层的影响,通过微观图像讨论了激光加工氧化铝陶瓷的作用机理。经过工艺优化,在功率18 W、扫描速度500 mm/s、重复频率100 kHz、正离焦量0.5 mm的加工参数下,获得了直径100μm、厚度0.2 mm、锥度<6°、无表面微裂纹的微孔。Ceramic matrix composite materials are suitable for high-power power electronic modules,aerospace and military electronics due to its excellent heat dissipation performance,insulation,thermal expansion coefficient,physical hardness and so on,but defects such as edge breakage,intermittent tearing and so on and unrealizable micro holes machining during traditional course of working limited its application.Aimed at the demand for high-quality micro-hole processing of alumina ceramics,an infrared picosecond laser was used as the light source to carry out drilling experiments on alumina ceramics.The effects of laser power,defocusing amount and scanning speed on the micro-hole taper heat affected zone,and recast layers were analyzed,and the mechanism of laser processing alumina ceramics was discussed through microscopic images.After process optimization,with the processing parameters of 18 W power,500 mm/s scanning speed,100 kHz repetition frequency,and 0.5 mm positive defocus,a micro-hole with diameter of 100μm,thickness of 0.2 mm,taper less than 6°and no surface cracks was obtained.

关 键 词：皮秒激光 微加工 氧化铝陶瓷 工艺参数 锥度 激光加工 

分 类 号：O439[机械工程—光学工程]