类金刚石薄膜膜基结合强度优化技术研究进展  

Study on Optimization Technology of Bonding Strength of DLC Films

作　　者：郭栋 张树玲 甘志颖 郭峰 GUO Dong;ZHANG Shuling;GAN Zhiying;GUO Feng(School of Mechanical and Automotive Engineering,Qingdao University of Technology,Qingdao 266520,China)

机构地区：[1]青岛理工大学机械与汽车工程学院,山东青岛266520

出　　处：《宁夏工程技术》2022年第1期84-91,共8页Ningxia Engineering Technology

基　　金：国家自然科学基金项目(51861031)。

摘　　要：类金刚石膜是由sp2键合的石墨与sp3键合的金刚石组成的一类碳膜,具备石墨的润滑特性和金刚石的高硬度,在降低摩擦因数、耐磨等方面具有重要应用价值。但薄膜较大的残余应力以及膜基结合问题的存在,限制了其在机械、电子、医学等范围内的普遍应用。国内外研究表明,掺杂元素、生成过渡层、设计多层膜成为有效改善类金刚石薄膜膜基结合强度的关键技术。介绍了掺杂单一元素、多元素,生成过渡层、设计多层膜等技术在类金刚石薄膜成形、强化中的作用机理,以及使用过程中的优点,如低的摩擦因数和内应力、高的耐磨性、与基体良好的结合性和优越的高温性能等;归纳了这4类技术的不足和待完善之处。提出今后的研究可以向着超厚薄膜、多元素掺杂薄膜、软硬交替多层膜结构的设计发展。优化计算机系统软件,使薄膜形貌、膜厚检测技术更加成熟,这也是以后的研究重点。Diamond-like carbon(DLC)films are amorphous materials with carbon atoms bonded in mainly sp3and sp2hybridizations.They possess the lubricating properties of graphite and the high hardness of diamond,with great application values in reducing friction factor and increasing wear resistance.However,the large residual stress of the films and the existence of film-based bonding problems limit their general application in the scope of mechanical,electronic,medical and other fields.Domestic and international studies have shown that doping elements,generating transition layers,and designing multi-layer films become the key technologies to effectively improve the film-based bonding strength of DLC films.This paper introduces the mechanism of doping single and multiple elements,transition layers and multi-layer films in the formation and strengthening of DLC films,and the advantages in the process,such as low friction factor and internal stress,high wear resistance,good bonding with the substrate,and superior high temperature performance,etc.The shortcomings of these four types of technologies and the areas to be improved are summarized.It is proposed that future research can be directed toward the design of ultra-thick films,multi-element doped films,and alternating soft and hard multi-layer film structures.The optimization of computer system software makes the film morphology and film thickness detection technology more mature,which is also the focus of future research.

关 键 词：掺杂元素 内应力 类金刚石膜 结合力 过渡层 多层膜设计 

分 类 号：TB43[一般工业技术] TH117.1[机械工程—机械设计及理论]