压阻式加速度传感器温度补偿电路的设计  

Design of temperature compensation circuit for piezoresistive acceleration sensor

作　　者：杨文 靳鸿[1] 杨春迪 张晶[2] 亢玮冬 YANG Wen;JIN Hong;YANG Chundi;ZHANG Jing;KANG Weidong(MOE Key Laboratory of Instrumentation Science&Dynamic Measurement,North University of China,Taiyuan 030051,China;Shanxi Vocational and Technical College of Finance and Trade,Taiyuan 030031,China;Jinxi Industries Group Co.,Ltd.,Taiyuan 030027,China)

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051 [2]山西财贸职业技术学院,山西太原030031 [3]晋西工业集团有限责任公司,山西太原030027

出　　处：《现代电子技术》2022年第8期18-24,共7页Modern Electronics Technique

基　　金：山西省装备预研重点实验室基金(61420010402001)。

摘　　要：针对温度影响压阻式加速度传感器精确性和可靠性等问题,文中从压阻式加速度传感器的原理出发,结合公式推导解释其产生温漂的原因;通过高低温实验分别探究温度对压阻式单轴、三轴加速度传感器的影响,并对实验数据进行最小二乘曲线拟合,得出其变化关系式。依据变化关系式设计以FPGA为主控芯片的温度补偿电路,使用VHDL语言为系统编程并计算出其补偿值;然后对传感器进行温度补偿实验。结果表明:传感器的零位输出电压经差分放大后与基准电压较接近;补偿后,压阻式加速度传感器的温漂得到极大的改善,其精确性和可靠性得到提高,可满足外场试验的需要。In allusion to the temperature influence on the accuracy and reliability of the piezoresistive acceleration sensor,starting from the principle of the piezoresistive acceleration sensor,the reasons for the temperature drift is explained combined with the formula derivation. The influence of temperature on the piezoresistive single-axis and three-axis acceleration sensors is explored by means of high and low temperature experiments,and the experimental data is fitted with least squares curve to obtain its change relationship. According to the change relationship,the temperature compensation circuit with FPGA as the main control chip is designed,and the system is programmed in VHDL language and its compensation value is calculated. The temperature compensation experiments on the sensor is performed. The results show that the zero output voltage of the sensor is close to the reference voltage after differential amplification. After compensation,the temperature drift of the piezoresistive acceleration sensor has been greatly improved,and its accuracy and reliability have been improved,which can meet the needs of field tests.

关 键 词：压阻式加速度传感器 温漂特性 温度补偿 FPGA 最小二乘曲线拟合 差分运算 滤波电路 电压跟随器 零位输出电压 

分 类 号：TN722-34[电子电信—电路与系统] TP212.1[自动化与计算机技术—检测技术与自动化装置]