基于交流电桥的陶瓷基高温压力传感器设计与仿真  

Design and simulation of ceramic-based high temperature pressure sensor based on AC bridge

作　　者：贾鹏宇 熊继军 李晨[1,2] JIA Pengyu;XIONG Jijun;LI Chen(Key Laboratory of Electronic Testing for National Defense Science and Technology,Taiyuan 030051,China;Key Laboratory of Instrumentation Science and Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China)

机构地区：[1]电子测试国防科技重点实验室,山西太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《传感器与微系统》2022年第4期19-23,共5页Transducer and Microsystem Technologies

基　　金：中国航空发展集团产学研合作项目(HFZL2020CXY019);中国博士后科学基金资助项目(2019M661071)。

摘　　要：为解决高温环境下压力精准测量的难题,提出一种基于交流电桥的陶瓷基高温压力传感器。通过厚膜技术在陶瓷基底上集成交流电桥,敏感电容作为桥路元件随外界压力的变化而变化,而电桥将这种电容信号变化转变为电压信号变化输出,这种方法避免了高温环境可能导致的敏感单元失效以及电容式传感器因寄生电容引起的测量不准确问题。仿真结果表明了该传感器在高温环境中具有很高的输出线性度以及灵敏度,800℃时,传感器输出的最大非线性误差仅为1.8%,灵敏度达到了6.0×10^(-4)pF/kPa,20~800℃内传感器总的温漂约为0.48 pF,温度漂移约为6×10^(-4)pF/℃。上述结果验证了该敏感单元在高温环境下原位测量压力的有效性,该测试方法为实现更高耐受温度、更高精度的超高温压传感器的设计与研究提供了方法借鉴。To solve the problem of accurate pressure measurement in high temperature environment,a ceramic-based high-temperature pressure sensor based on AC bridge is proposed.By using thick film technology to integrate an AC bridge on ceramic substrate.As a bridge component,sensitive capacitors will change with variation of external pressure,and the bridge converts the variation of capacitance signal into variation of voltage signal and output.This method avoids the sensitive unit failure that may be caused by the high temperature environment and the inaccurate measurement caused by the parasitic capacitance of the capacitive sensor.The simulation results show that the sensor has high output linearity and sensitivity in the high temperature environment,at 800℃,the maximum non-linear error of the sensor output is only 1.8%,and the sensitivity reaches 6.0×10^(-4)pF/kPa.The total temperature drift of the sensor from 20℃to 800℃is about 0.48 pF,and the temperature drift is about 6×10^(-4)pF/℃.The above results verify the effectiveness of the sensitive unit in in-situ pressure measurement in a high temperature environment,and this test method provides a reference for the design and research of ultra-high temperature pressure sensors with higher temperature tolerance and higher precision.

关 键 词：高温压力传感器 敏感电容 交流电桥 Comsol分析 陶瓷膜片 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]