基于光纤法布里-珀罗腔的振动测量技术研究  

Research on vibration measurement technology based on optical fiber Fabry-Perot cavity

作　　者：蒲金飞 蒲俊吉 吴宇列[1] 肖定邦[1] 吴学忠[1] PU Jinfei;PU Junji;WU Yulie;XIAO Dingbang;WU Xuezhong(College of Intelligent Science,National University of Defense Technology,Changsha 410073,China)

机构地区：[1]国防科技大学智能科学学院,湖南长沙410073

出　　处：《传感器与微系统》2022年第4期40-43,共4页Transducer and Microsystem Technologies

摘　　要：针对各类机械工程装备对振动测量的需求,特别是在恶劣环境下的振动测量,构建了基于光纤法布里-珀罗腔的振动测量系统,对其振动测量性能进行了深入研究,包括工作点漂移特性、高频率振动测量和小振动测量性能等进行了评测。实验结果表明:所构建的光纤振动测量系统可以实现高频率、高分辨率、高精度的振动测量,可以较好地满足各种高性能工业振动测量的需求,并对新型非压电式高精度、小体积、耐高温振动传感器研制具有较好的指导意义。Aiming at the requirements of various mechanical engineering equipment for vibration measurement,especially in harsh environment,a vibration measurement system based on optical fiber Fabry Perot cavity is constructed,and its vibration measurement performance is deeply studied and evaluated,including working point drift characteristics,high-frequency vibration measurement performance and small vibration measurement performance.The experimental results show that the constructed optical fiber vibration measurement system can realize high-frequency,high-resolution and high-precision vibration measurement,and it can meet the needs of various high-performance industrial vibration measurement well and has good guiding significance for research and fabrication of new non-piezoelectric high-precision,small volume,and high-temperature resistant vibration sensor.

关 键 词：法布里-珀罗腔 高温振动传感器 光纤振动测量系统 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]