基于石墨烯压阻效应的宽量程MEMS压力传感器设计  

Design of wide range MEMS pressure sensor based on graphene piezoresistive effect

作　　者：朱泽华 王俊强 刘小飞 齐越 武晨阳 李孟委 ZHU Zehua;WANG Junqiang;LIU Xiaofei;QI Yue;WU Chenyang;LI Mengwei(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China;Nantong Institute of Intelligent Opto-Mechatronics of North University of China,Nantong 226000,China)

机构地区：[1]中北大学仪器与电子学院,山西太原030051 [2]中北大学前沿交叉科学研究院,山西太原030051 [3]中北大学南通智能光机电研究院,江苏南通226000

出　　处：《传感器与微系统》2022年第4期66-69,共4页Transducer and Microsystem Technologies

基　　金：国防173计划技术领域基金资助项目(2021JCJQJJ0172)。

摘　　要：针对传统悬浮式石墨烯压力传感器存在量程小、体积大、非线性度高等问题,设计了一种膜-岛结构的宽量程石墨烯MEMS压力传感器。使用COMSOL有限元仿真软件和噪声分析法对弹性膜片及石墨烯敏感单元尺寸进行优化设计。结果表明:在0~25 MPa范围,传感器最大应变为0.314%,固有频率高达1.3534 MHz;采用TSV垂直互联技术实现压力传感器芯片的三维集成,芯片封装尺寸仅为2 mm×2 mm。本文设计的石墨烯MEMS压力传感器具有体积小、集成度高、固有频率高、量程宽等特点,对未来高性能石墨烯压力传感器及其他石墨烯力学传感器设计和应用具有指导意义。In order to solve the problems of small range,large size and high nonlinearity of traditional suspension graphene pressure sensor,a wide range graphene micro-electro-mechanical system(MEMS)pressure sensor with membrane-island structure is designed.COMSOL finite element simulation software and noise analysis are used to optimize the size of elastic diaphragm and graphene sensitive element.The results show that the maximum strain of the sensor is 0.314%and the natural frequency is up to 1.3534 MHz in the range of 0~25 MPa.TSV vertical interconnection technology is used to realize the three-dimensional integration of the pressure sensor chip.The chip package size is only 2 mm×2 mm.The designed graphene MEMS pressure sensor has the characteristics of small volume,high integration,high natural frequency,wide range and so on.It can provide guidance for the design and application of high-performance graphene pressure sensors and other graphene mechanical sensors in the future.

关 键 词：石墨烯 压阻效应 宽量程 微机电系统 压力传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]