Cr,Ni的掺杂对TiAlN基薄膜高温摩擦性能的影响  

Effect of Cr and Ni Doping on the High Temperature Friction Properties of TiAlN-Based Thin Films

作　　者：梁慕林 王成磊[1] 秦海青 肖乐银 梁朝杰 张可翔 谢映光 刘伟杰 杨纪洁 LIANG Mu-lin;WANG Cheng-lei;QIN Hai-qing;XIAO Le-yin;LIANG Chao-jie;ZHANG Ke-xiang;XIE Ying-guang;LIU Wei-jie;YANG Ji-jie(School of Materials Science and Engineering,Guangxi Key Laboratory of Information Materials,Engineering Research Center of Electronic Information Materials and Devices,Ministry of Education,Guilin University of Electronic Technology,Guangxi,Guilin 541004,China;China Nonferrous Metal(Guilin)Geology Mining Co.,Ltd.,and Guangxi Key Laboratory of Superhard Material,National Engineering Research Center for Special Mineral Material,Guangxi,Guilin 541004,China)

机构地区：[1]桂林电子科技大学材料科学与工程学院广西电子信息材料构效关系重点实验室电子信息材料与器件教育部工程研究中心,广西桂林541004 [2]中国有色桂林矿产地质研究院有限公司广西超硬材料重点实验室国家特种矿物材料工程技术研究中心,广西桂林541004

出　　处：《材料保护》2022年第2期22-29,共8页Materials Protection

基　　金：国家自然科学基金项目(52161011);广西自然科学基金项目(2018GXNSFAA281244,2020GXNSFAA297060);中国博士后科学基金资助项目(2020M681092);暨南大学灾害预报与控制工程教育部重点实验室项目(20200904006);广东省基础应用与研究基金(2020B1515420004);桂林市科学研究与技术开发计划(2020010903,20210217-6);电子信息材料与器件教育部工程研究中心自主研究基金(EIMD-AB202009);广西电子信息材料构效关系重点实验室项目(211024-Z,211003-K,201016-Z);桂林电子科技大学研究生教育创新项目(2020YCXS118;2022YCXS200)。

摘　　要：为了开发具有优异抗摩擦磨损性能的薄膜材料,采用多弧离子镀在4Cr13马氏体不锈钢表面沉积TiAlN薄膜,采用磁控溅射法和多弧离子镀在4Cr13表面分别沉积掺杂Cr和Cr-Ni的TiAlN薄膜。采用扫描电镜(SEM)、X射线衍射仪(XRD)和维氏硬度计分析薄膜的表面形貌、物相和表面硬度,并对不同温度下磨损后的薄膜表面形貌、成分及物相进行了分析。结果表明:Cr,Ni掺杂后薄膜的表面硬度降低;随着温度的升高,3种薄膜的摩擦系数都在降低,在各个温度下Cr-Ni共掺杂的TiAlN薄膜的摩擦系数都最小,其次为掺杂Cr的TiAlN薄膜,这说明Cr,Ni元素的加入有助于改善材料的摩擦系数;在100℃和300℃下摩擦后,未掺杂的TiAlN薄膜的磨损量均高于掺杂后的TiAlN薄膜,Cr-Ni共掺杂的TiAlN薄膜的磨损量最低;摩擦温度升高到500℃后TiAlN薄膜的磨损量比掺杂后的薄膜要低。For developing thin film materials with excellent friction and wear resistance,TiAlN thin films were deposited on the surface of 4 Cr13 martensitic stainless steel by multi-arc ion plating,and TiAlN thin films doped with Cr and Cr-Ni were deposited on the surface of 4 Cr13 by magnetron sputtering and multi arc ion plating,respectively.Scanning electron microscope(SEM),X-ray diffractometer(XRD)and Vickers hardness tester were used to analyze the surface morphology,phase and surface hardness of the film.The surface morphology,composition and phase of the worn film at different temperatures were analyzed.Results showed that the surface hardness of the film decreased after doped with Cr and Ni.As the temperature increased,the friction coefficient of the three films decreased.Moreover,the friction coefficientof the TiAlN film co-doped with Cr and Ni was the smallest at each temperature,followed by Cr-doped TiAlN film,which showed that theaddition of Cr and Ni was beneficial to decrease the friction coefficient of the material.After friction at 100℃and 300℃,the wear amount ofundoped TiAlN film was higher than those after doping,and the wear amount of TiAlN films co-doped with Cr and Ni was the lowest.When thefriction temperature increased to 500℃,the wear amount of TiAlN films was lower than that of doped films.

关 键 词：TIALN薄膜 掺杂 高温摩擦性能 硬度 摩擦磨损 

分 类 号：TG174.444[金属学及工艺—金属表面处理]