硅基光子调制器研究进展  

Research Progress of Silicon-Based Photonic Modulator

作　　者：胡祥建 冯松[1] 冯露露 王迪 刘勇 陈梦林 丁斌斌 韩超 韩小祥 HU Xiangjian;FENG Song;FENG Lulu;WANG Di;LIU Yong;CHEN Menglin;DING Binbin;HAN Chao;HAN Xiaoxiang(Xi'an Polytechnic University,Xi'an 710048,China)

机构地区：[1]西安工程大学理学院,西安710048

出　　处：《集成技术》2022年第2期89-106,共18页Journal of Integration Technology

基　　金：国家重点研发计划项目(2018YFB2200500);国家自然科学基金项目(61204080);国家重点实验室基金项目(SKL201804);陕西省重点研发计划项目(2022GY-012,2020KW-011);西安市科技计划项目(2020KJRC0026)~~。

摘　　要：光子调制器是光纤通信系统的核心器件,主要对光信号进行调制,实现信号从电域到光域的转换。随着硅基半导体工艺的发展,硅基光子调制器逐渐成为了主流硅光子器件,基于硅工艺技术的千兆赫兹带宽调制器的实现,也为硅光子学的发展奠定了基础。目前,硅基光子调制器的调制速度已经超过了50 GHz,基本满足了调制格式的带宽需求。但低驱动电压和低插入损耗的硅基光子调制器仍然是一个值得研究的领域,越来越多的研究机构加入硅基光子调制器的研究,使其取得了长足的进展。该文主要对国内外硅基光子调制器的研究进展进行分析,讨论了基于SOI材料、SiGe材料、Ge材料、铁电材料、有机光电材料、III-V族材料和石墨烯材料等硅基光子调制器的研究现状,并对相关调制器的性能进行了对比和分析,为未来继续研发高速率、低损耗的光子调制器提供了思路。Photonic modulator is the core component of optical fiber communication system,which mainly modulates the optical signal and realizes the conversion of the signal from the electrical domain to the optical domain.With the development of silicon based semiconductor technology,silicon based photonic modulator has gradually become the mainstream silicon photonic devices,and the realization of gigahertz bandwidth modulator based on silicon technology has laid a foundation for the development of silicon photonics.At present,the modulation speed of silicon-based photonic modulator has exceeded 50 GHz,which basically meets the bandwidth requirements of modulation format.However,silicon-based photonic modulators with low driving voltage and low insertion loss are still a field worthy of research.More and more research institutions have joined the research of silicon-based photonic modulators and have made great progress.This paper mainly analyzes the research progress of silicon-based photonic modulators at home and abroad,discusses the research status of silicon-based photonic modulators based on SOI materials,SiGe materials,Ge materials,ferroelectric materials,organic photoelectric materials,Ⅲ-Ⅴgroup materials and graphene materials,and compares and analyzes the performance of relevant modulators.It provides ideas for further research and development of photonic modulator with high speed and low loss in the future.

关 键 词：光子器件 调制器 硅基 研究进展 

分 类 号：O43[机械工程—光学工程] O47[理学—光学]