国外MEMS计量测试技术研究现状及借鉴  

Research status and experience of overseas MEMS metrology and testing technology

作　　者：李雷 张慧 沙长涛[1] 张红[1] LI Lei;ZHANG Hui;SHA Changtao;ZHANG Hong(China Electronics Standardization Institute,Beijing 100176)

机构地区：[1]中国电子技术标准化研究院,北京100176

出　　处：《计测技术》2022年第1期18-25,共8页Metrology & Measurement Technology

摘　　要：随着体积小、精度高、智能化的MEMS器件得到越来越多的应用,MEMS计量测试技术的研究越来越重要。为了进一步提高和完善我国MEMS计量测试技术,介绍了国外多个机构和组织的MEMS计量规划和技术现状,梳理了先进的MEMS计量测试技术研究工作,指明了在哪些方面需要借鉴国外先进的研究经验和成果。可以帮助国内研究者了解国内外MEMS计量测试技术研究现状,进而促进我国MEMS计量测试技术的发展。With the increasing application of small-sized,high precision and intelligent MEMS devices,the research on MEMS metrology and testing technology is becoming more and more important.In order to improve China′s MEMS metrology and testing tech⁃nology,the MEMS metrology plans and technical status of some overseas institutions and organizations are introduced,the research works on advanced MEMS metrology and testing technology are reviewed,and the aspects in which China needs to learn from overseas research experiences and achievements are pointed out.This can help domestic researchers to understand the research status of MEMS metrology and testing technology in other countries,so as to promote the development of MEMS metrology and testing technology in China.

关 键 词：计量学 微机电系统 测试 标准 

分 类 号：TB92[一般工业技术—计量学] TP21[机械工程—测试计量技术及仪器]