精密涂布设备的控制流程及技术分析  

Analysis of Control Flow and Technology of Precision Coating Equipment

作　　者：汤喻翔 TANG Yuxiang(Beijing Grish Hitech Co.,Ltd.,Beijing 100085,China.)

机构地区：[1]北京国瑞升科技股份有限公司,北京100085

出　　处：《集成电路应用》2022年第3期69-71,共3页Application of IC

摘　　要：分析表明,精密涂布设备是精密电子产品抛光工艺中的重要组成部分,分析精密涂布设备控制流程,并明确设备控制参数,提高精密涂布设备的综合控制水平。阐述精密涂布设备控制流程,以保质、增产、降耗为核心,建立控制平台,保证精密涂布设备的稳定运行。结合精密涂布产品工艺特点以及关键工艺参数设定,利用模拟仿真产品生产动态变化过程,对精密涂布设备控制流程进行设计,建立综合性的控制方案,从而保证精密涂布设备长期稳定运行,尽可能减少人工操作的工作强度,提高精密涂布设备的自动化控制水平。The analysis shows that the precision coating equipment is an important part of the precision electronic products polishing process. Analyze the control process of the precision coating equipment, clarify the equipment control parameters, and improve the comprehensive control level of the precision coating equipment. This paper expounds the control process of precision coating equipment, takes quality assurance, production increase and consumption reduction as the core, and establishes a control platform to ensure the stable operation of precision coating equipment. Combined with the process characteristics of precision coating and the setting of key process parameters, the control process of precision coating equipment is designed by simulating the dynamic change process of product production, and a comprehensive control scheme is established, so as to ensure the longterm stable operation of precision coating equipment, reduce the working intensity of manual operation as much as possible, and improve the automatic control level of precision coating equipment.

关 键 词：控制技术 精密涂布设备 流程控制 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置] TG663[自动化与计算机技术—控制科学与工程]