磁控共溅射制备YbCu及YbCuAl非晶合金薄膜  

Preparation of YbCu and YbCuAl Amorphous Films by Magnetron Co-sputtering

作　　者：崔红兵 张茂彩 王誉 辛博[1] Cui Hongbing;Zhang Maocai;Wang Yu;Xin Bo(State Key Laboratory of Baiyunobo Rare Earth Resource Researches and Comprehensive Utilization,Baotou Research Institute of Rare Earths,Baotou 014030,China)

机构地区：[1]包头稀土研究院白云鄂博稀土资源研究与综合利用国家重点实验室,内蒙古包头014030

出　　处：《稀有金属材料与工程》2022年第3期1040-1046,共7页Rare Metal Materials and Engineering

基　　金：白云鄂博稀土资源研究与综合利用国家重点实验室自主课题(2020Z2135)。

摘　　要：基于高通量材料基因工程,通过倾斜靶和调控单金属靶功率制备了化学组成连续变化的镱-铜(Yb-Cu)非晶合金金属薄膜,从而快速筛选出非晶形成范围,并且成功制备出YbCu非晶合金薄膜,同时研究了铝对YbCu非晶合金形成的影响,并制备了YbCuAl非晶薄膜。当Yb含量在44.5%~46.5%(质量分数)时薄膜全部为非晶态。原子力扫描(AFM)结果表明YbCu非晶合金表面光滑无缺陷,高度绝对差仅为31.6 nm,薄膜呈现疏水性,最大疏水角为119°。YbCu和YbCuAl非晶薄膜最大方阻分别为551和1738 mΩ·□^(-1),合金元素Al对YbCu非晶薄膜性能产生了显著影响。YbCu(Al)非晶薄膜的成分筛选和制备加快了稀土基非晶新材料的开发。Based on the concept of high-throughput material genetic engineering,metal thin films with continuous change of chemical composition were prepared by tilting target and adjusting single metal target power,so as to quickly screen the composition range of YbCu amorphous alloy,and YbCu amorphous alloy film was successfully prepared for the first time.At the same time,the influence of aluminum on the formation of YbCu amorphous alloy was studied and YbCuAl amorphous films were prepared.When the Yb content is between 44.5wt%~46.5wt%,the films are all amorphous.The results show that the surface of YbCu amorphous alloy is smooth without defects,and the absolute height difference is only 31.6 nm.The film is hydrophobic with a maximum hydrophobic angle of 119°.In addition,the maximum square resistance of YbCu and YbCuAl amorphous films is 551 and 1738 mΩ·□^(-1),respectively.The alloying element Al has a significant effect on the properties of YbCu amorphous films.Therefore,the composition screening and successful preparation of YbCu(Al)amorphous films accelerate the development of rare earth based amorphous materials.

关 键 词：非晶合金薄膜 玻璃形成能力 YbCu合金 磁控溅射 高通量制备 

分 类 号：TB43[一般工业技术]