湿法刻蚀制备铌酸锂锥形脊波导  

Preparation of Lithium Niobate Taper Ridge Waveguide by Wet Etching

作　　者：谷珍杰 温旭杰 张维佳 华平壤[3] 饶前程 黄颖 GU Zhenjie;WEN Xujie;ZHANG Weijia;HUA Pingrang;RAO Qiancheng;HUANG Ying(College of Electronic Information and Automation,Tianjin University of Science&Technology,Tianjin 300222,China;CETC Deqing Huaying Electronics Co.,Ltd.,Huzhou 313000,China;School of Precision Instrument and Opto-electronics Engineering,Tianjin University,Tianjin 300072,China)

机构地区：[1]天津科技大学电子信息与自动化学院,天津300222 [2]中电科技德清华莹电子有限公司,湖州313000 [3]天津大学精密仪器与光电子工程学院,天津300072

出　　处：《天津科技大学学报》2022年第2期57-60,共4页Journal of Tianjin University of Science & Technology

基　　金：2020年天津市“项目+团队”重点培养专项(XC202026);天津市重点研发计划科技支撑项目(19YFZCGX00140)。

摘　　要：采用由质子交换辅助湿法刻蚀技术,在Z切铌酸锂晶体上成功制备锥形脊波导.该波导脊高为1.2μm、脊宽从4μm增大至8μm,插入损耗4.4 dB.波导表面光滑,表面粗糙度为0.84 nm,没有出现塌边或横向刻蚀的现象.波导宽度从4μm增大至8μm,模式尺寸在水平方向上从4.3μm增大至6.8μm,在垂直方向上从3.2μm增大至5.6μm.当波导宽度增大时模场尺寸也增大,实现小模场与大模场之间的转换.The tapered ridge waveguide was successfully fabricated by proton exchange-assisted wet etching on Z-cut lithium niobate crystal.The ridge height of the waveguide is 1.2μm,and the width of the cone increases from 4μm to 8μm.The insertion loss of the waveguide is 4.4 dB.The surface of the waveguide is smooth with a surface roughness of 0.836 nm,and there is no edge collapse or transverse etching.The waveguide width increases from 4μm to 8μm.The model size increases from 4.3μm to 6.8μm in the horizontal direction and from 3.2μm to 5.6μm in the vertical direction.When the width of waveguide increases,the size of mode field also increases,realizing the conversion between the small mode and the large mode field.

关 键 词：质子交换 铌酸锂 锥形结构 湿法刻蚀 脊波导 

分 类 号：TN252[电子电信—物理电子学]