用改进灰关联法研究磁控溅射工艺参数对二氧化钛镀膜的影响  

Study on the effects of magnetron sputtering parameters on titania coating based on improved grey correlation analysis

作　　者：陈功 宗律 张鑫道 潘俊杰 吴峰 王䶮 苏鹏举 CHEN Gong;ZONG Lyu;ZHANG Xindao;PAN Junjie;WU Feng;WANG Yan;SU Pengju(College of Electrical Information Engineering,Changzhou Institute of Technology,Changzhou 213032,China;Changzhou LeMeng Pressure Vessel Co.,Ltd.,Changzhou 213129,China)

机构地区：[1]常州工学院电气信息工程学院,江苏常州213032 [2]常州乐萌压力容器有限公司,江苏常州213129

出　　处：《电镀与涂饰》2022年第6期437-445,共9页Electroplating & Finishing

基　　金：江苏省科技成果转化专项资金项目(BA2019020032);无损检测技术教育部重点实验室(南昌航空大学)开放基金项目(EW201980089);江苏省高校优秀科技创新团队。

摘　　要：磁控溅射中工艺参数对二氧化钛镀膜透过率和厚度有较大影响,传统工艺参数决策所采用的单一因素法忽略参数间的关联性。构建的改进灰关联度量化模型在基于数据绝对位置差异的传统灰关联模型的基础上,考虑了数据间变化率差异,结合磁控溅射中主要影响参数──溅射温度、本底真空压强、溅射气压和溅射电压,对不同改进模型参数进行实验,从实验结果中得到最优的改进灰关联度量化模型。用所建模型对不同数量组的二氧化钛薄膜透过率和厚度进行分析,并与相关性模型和传统灰关联模型进行比较。结果表明:相比于传统灰关联模型,所提出的改进模型在检测准确率上提升5~10个百分点,且更适合于透过率的工艺性能检测。Technological parameters of magnetron sputtering have great influence on the transmittance and thickness of titania coating.Traditional methodology for determining technological parameters based on single-factor experiment ignores the correlation between the parameters.An improved grey correlation quantitative model considering the absolute position difference of data and the difference of their changing rates was established,and optimized by analysis on its parameters in combination with the experiments on main technological parameters i.e.sputtering temperature,background vacuum pressure,sputtering pressure,and sputtering voltage.The transmittance and thickness of titania coatings were analyzed by using the model with different numbers of samples.The accuracy of the improved model was compared with the correlation model and traditional grey correlation model.The results showed that the improved model had a detection accuracy 5 to 10 percentage points higher than the traditional grey correlation model,and could be more suitable for transmittance detection.

关 键 词：二氧化钛薄膜 磁控溅射 透过率 厚度 改进灰关联度量化模型 

分 类 号：TG174.444[金属学及工艺—金属表面处理]