低温波荡器超高真空系统研制  

Development of Ultra-High Vacuum System for Cryogenic Permanent Magnet Undulator

作　　者：张磊[1] 陆辉华[1] 孙舒晨 张祥镇 孙亚军 赵述涛 李志强 陈宛[1] 龚玲玲 马永胜[1] 李啸宇[1] 李煜辉 巩克云[1] 郭青 黄永胜 杨燕伟 ZHANG Lei;LU Huihua;SUN Shuchen;ZHANG Xiangzhen;SUN Yajun;ZHAO Shutao;LI Zhiqiang;CHEN Wan;GONG Lingling;MA Yongsheng;LI Xiaoyu;LI Yuhui;GONG Keyun;GUO Qing;HUANG Yongsheng;YANG Yanwei(Institute of High Energy Physics,Chinese Academies of Sciences,Beijing 100049,China;University of Chinese Academies of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院高能物理研究所,北京100049 [2]中国科学院大学,北京100049

出　　处：《真空科学与技术学报》2022年第3期159-164,共6页Chinese Journal of Vacuum Science and Technology

摘　　要：在高能辐射同步光源验证装置(HEPS-TF)阶段,研制了一台低温永磁波荡器(CPMU)样机,周期长度为13.5 mm。低温波荡器的磁结构放置在真空室中,存在大量的材料出气与夹气,为了提供束流正常运行所需的超高真空环境,研制了波荡器的超高真空系统。首先估算了波荡器的放气率、放气量,并根据指标要求计算了真空系统所需的有效抽速;然后合理设计了配泵方案;在真空室加工完成后进行了极限真空测试;波荡器安装调试完成后,在没有经过真空烘烤的情况下,真空度在常温下达到5×10^(-7)Pa,低温下达到4.8×10^(-8)Pa,均优于设计指标。At the stage of the High Energy Photon Source-Test Facility(HEPS-TF),a prototype of a cryogenic permanent magnet undulator(CPMU)with a period length of 13.5 mm was developed.The magnetic structures of the CPMU are placed in a vacuum chamber,and have a large amount of material outgassing and entrainment.In order to provide the ultra-high vacuum environment required for the normal operation of the beam,the ultra-high vacuum system of the undulator has been developed.First,the outgassing rate and outgassing load of the undulator were estimated,and then the effective pumping speed required by the vacuum system was calculated.Next,rationally chosen the type and the quality of the pumps;after the machining of the vacuum chamber,the ultimate vacuum test was carried out;and after installation of the CPMU,the base pressure reaches 5×10^(-7)Pa at room temperature and 4.8×10^(-8)Pa at 80 K,both of which are better than the requirements.

关 键 词：高能同步辐射光源 低温波荡器 超高真空 真空系统 

分 类 号：TB753.3[一般工业技术—真空技术]