基于激光对刀仪的高精度在位测量及补偿方法  

High precision on-site measurement and compensation method based on the laser tool presetter

作　　者：陶宇轩 刘秀峰 曹海印 Tao Yuxuan;Liu Xiufeng;Cao Haiyin(School of Mechanical Science and Engineering,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]华中科技大学机械科学与工程学院,武汉430074

出　　处：《仪器仪表学报》2021年第12期1-8,共8页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(51875223);国防基础科研核科学挑战专题(TZ2018006)项目资助。

摘　　要：球型砂轮在位修整前后的直径变化将导致理想与实际的磨削轨迹之间出现位置偏差,造成加工误差,因此在超精密磨削加工前获取该变化信息是十分有必要的。针对于此,提出了一种球型砂轮在位测量方案,包括搭建基于激光对刀仪的在位测量系统以及设计在位测量步骤,并针对该方案存在的系统误差进行分析,抽象出了激光对刀仪安装误差模型,结合齐次坐标变换推导了误差公式,借助最小二乘法求解安装误差,从而实现了对测量数据的补偿与对球型砂轮的高精度在位测量。最后以12.5 mm半径的标准球做标定,计算出误差角度值用作补偿,再分别测量12.5 mm与3 mm标准球作为验证。实验表明该方案可将测量精度从4μm提高到1.2μm。The diameter change of the spherical grinding wheel after on-site dressing may lead to position deviation between ideal and actual grinding trajectory, which bring the machining error. Therefore, it is very necessary to obtain the change information before ultra-precision grinding. In view of this, this article proposes an on-site measurement scheme of the spherical grinding wheel, including the establishment of the on-site measurement system based on the laser tool presetter and on-site measurement steps design. The systematic error of this scheme is analyzed, the installation error model of laser tool presetter is abstracted, the error formula is deduced combined with homogeneous coordinate transformation, and the installation error is solved by the least square method. Therefore, the compensation of measurement data and high-precision on-site measurement of the spherical grinding wheel are realized. Finally, the standard ball with 12.5 mm radius is used for calibration, and the error angle value is calculated for compensation. Then, the 12.5 mm and 3 mm standard balls are measured for verification. Experimental results show that the measurement accuracy can be improved from 4 μm to 1.2 μm.

关 键 词：超精密磨削 激光对刀仪 齐次坐标转换 最小二乘法 误差补偿 

分 类 号：TH74[机械工程—光学工程] TG596[机械工程—仪器科学与技术]