基于标准平面镜的双目偏折术系统标定  

System Calibration of Stereoscopic Deflectometry Based on Standard Plane Mirror

作　　者：熊兆华 赵文川(导师)[1] XIONG Zhao-hua;ZHAOWen-chuan(Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院光电技术研究所,四川成都610209 [2]中国科学院大学,北京100049

出　　处：《光学与光电技术》2022年第1期25-33,共9页Optics & Optoelectronic Technology

摘　　要：相位偏折术中,系统标定精度对面形测量精度具有决定性的影响。采用带标记点标靶进行标定时,由于其表面不是理想平面而引入误差,导致虚像姿态求解不精确,进而影响标定精度。通过使用高精度的标准平面镜作为反射镜,从初始系统参数开始,采用交替方向优化的方法实现系统几何参数的标定,提高了标定精度,同时避免了变量过多导致的矩阵病态问题。使用该方法对双目相位测量偏折系统进行标定后,对100 mm口径的标准平面镜进行了对比测量。由测量面形可知,该方法可显著降低测量均方根误差和低频面形误差。相比于传统带标记点标靶的方法,有效提高了标定的精度和稳定性。In the phase measuring deflectometry,the calibration accuracy of the system has a decisive influence on the accuracy of the profile measurement.When the calibration target with markers is used for calibration,the error will be introduced because the surface of calibration target is not an ideal plane,which leads to the inaccuracy of solving the pose of the virtual screen image,thus affecting the calibration accuracy.In order to reduce the error,a high precision standard plane mirror is used as a reflector.Starting from the initial system parameters,the system geometric parameters are calibrated using the method of alternating direction optimization,which improves the calibration accuracy and avoids the matrix illcondition caused by too many variables.In this paper,the binocular phase measurement deflection system with the proposed method is calibrated,and then the standard plane mirror with diameter of 100 mm is measured.The results show that the proposed method improves the accuracy and stability of the calibration compared with the traditional method with a calibration target with markers.

关 键 词：机器视觉 双目相位偏折术 系统标定 相机标定 标准平面镜 

分 类 号：O435[机械工程—光学工程]