激光干涉仪两种镜组直线度检测比对研究  

Comparison Study on Straightness Detection of Two Mirror Sets by Laser Interferometer

作　　者：赵红 严昊明[1] 刘莹 ZHAO Hong;YANHaoming;LIU Ying(Shenyang Machine Tool(Group)Co.,Ltd.Design and Research Institute,Shenyang 110042,China)

机构地区：[1]沈阳机床(集团)有限责任公司设计研究院,沈阳110042

出　　处：《计量科学与技术》2022年第3期54-57,29,共5页Metrology Science and Technology

摘　　要：介绍了利用激光干涉仪直线度镜组和角度镜组检测直线度的测量原理、检测方法及注意事项,并着重对两种检测方法进行对比分析,依托检测数据分析两种检测方法的精度、优势及应用环境的区别。This paper introduces the measurement principle, detection methods, and precautions of using the laser interferometer straightness mirror set and angular mirror set to detect straightness, and focuses on the comparative analysis of the two detection methods. Relying on the detection data, this paper analyzed the differences in the accuracy, advantages,and application environments of the two detection methods.

关 键 词：激光干涉仪 直线度镜组 角度镜组 比对 

分 类 号：TH744.3[机械工程—光学工程]