基于三明治结构的氧化锌纳米棒紫外光电探测器  

Zinc oxide nanorods based ultraviolet detector with sandwich structure

作　　者：商世广 吴沛仪 董云鹏 刘有耀 李雨辰 SHANG Shiguang;WU Peiyi;DONG Yunpeng;LIU Youyao;LI Yuchen(School of Electronic Engineering,Xi'an University of Posts and Telecommunications,Xi'an 710121,China)

机构地区：[1]西安邮电大学电子工程学院,陕西西安710121

出　　处：《西安邮电大学学报》2021年第6期24-28,共5页Journal of Xi’an University of Posts and Telecommunications

基　　金：国家自然科学基金项目(61874087,61634004)。

摘　　要：采用磁控溅射技术、水热法制备了三明治结构的氧化锌纳米棒(ZnO-NRs)紫外探测器,借助X射线仪、拉曼光谱仪、扫描电子显微镜等测量设备表征了ZnO纳米棒的晶体结构、表面形貌、光致发光谱、透过率以及紫外探测性能。结果表明,ZnO纳米棒沿(002)晶面择优取向生长、出现E_(2)(high)声子模散射峰,为六方纤锌矿结构;ZnO纳米棒的尺寸均匀,平均直径约为200 nm,平均长度约为4μm;在384 nm附近存在较强的光致荧光发射峰。相比于其他传统探测器,ZnO/Ag/ZnO-NRs三明治结构在紫外光区的光暗电流比为51.16,光响应度为1.58 A/W以及响应/恢复时间分别为6.8 s和10.5 s,具有较高的光暗电流比和光响应度,较短的响应/恢复时间。Zinc oxide nanorods(ZnO-NRs)based ultraviolet detector with sandwich structure is fabricated by magnetron sputtering technology and hydrothermal method.The crystalline structure,surface morphology,photoluminescence spectrum,transmittance and ultraviolet detection performance of the ZnO-NRs on the surface of sandwich structure are characterized by X-ray diffractometer,Roman spectrometer,scanning electron microscope and another measuring equipments.The experimental results show that the ZnO-NRs preferentially grow along the(002)crystal plane and exhibiting E_(2)(high)phonon mode,and have a hexagonal wurtzite structure.The sizes of ZnO-NRs are uniform,with an average diameter of about 200nm,and about 4μm in height.The ZnO-NRs show a strong excitation peak at 384 nm.The photo-to-dark current ratio with the sandwich structure of ZnO/Ag/ZnO-NRs in the ultraviolet region is 51.16 and photoelectric responsivity is 1.58 A/W,and the corresponding response time and recovery time are 6.8 s and 10.5 s,respectively.Compared with other traditional ultraviolet detector,the ZnO/Ag/ZnO-NRs sandwich structure has higher photo-toVdark current ratio and photoresponsivity and shorter response/recovery time.

关 键 词：三明治结构 氧化锌纳米棒 紫外探测器 磁控溅射 

分 类 号：O484.1[理学—固体物理]