加速电压和束流强度对热敏感材料扫描电镜图像的影响  

Effects of accelerating voltage and beam current on SEM images of heat sensitive materials

作　　者：周宏敏[1] 付圣权[1] 李明[1] 黄健柳 Zhou Hongmin;Fu Shengquan;Li Ming;Huang Jianliu(Instruments Center for Physical Science,University of Science and Technology of China,Hefei 230026,China;Research Microscopy Solutions,Carl Zeiss(Shanghai)Co.,Ltd.,Shanghai 200131,China)

机构地区：[1]中国科学技术大学理化科学实验中心,合肥230026 [2]卡尔蔡司(上海)管理有限公司研究显微镜解决方案事业部,上海200131

出　　处：《分析仪器》2022年第2期125-129,共5页Analytical Instrumentation

摘　　要：扫描电镜为材料形貌和成分分析中普遍使用的仪器,但部分材料由于导电性及导热性差,在实际观测过程中容易发生形貌变形。本实验以蓝绿藻、有机高分子和金属有机框架材料为样品,研究了不同加速电压和束流条件下对观测样品形貌的影响。实验结果表明对于热敏感材料,电子束总能量在一定范围内时,与束流相比,加速电压对材料的影响更大,优先采用降低加速电压更合适。Scanning electron microscope(SEM)is widely used in the analysis of material morphology and composition.However,some materials are prone to deformation due to poor conductivity and thermal stability.In this test,blue-green algae,organic polymer materials and metal organic frameworks are used as samples to study the effects of accelerating voltage and beam current on the morphology of the samples.The experimental results show that when the total energy is within a certain range,the accelerating voltage has a greater influence on the heat sensitive materials than the beam current,and the low accelerating voltage is preferred.

关 键 词：扫描电镜 加速电压 束流 热敏感材料 

分 类 号：TB34[一般工业技术—材料科学与工程]