无源器件在片散射参数校准比较方法研究  

Research for Calibration Comparison Method of Passive Devices on-wafer Scattering Parameters

作　　者：霍晔 吴爱华[1] 王一帮[1] 栾鹏[1] 刘晨[1] 梁法国[1] 孙静[1] 张立飞[1] 胡海龙 HUO Ye;WU Ai-hua;WANG Yi-bang;LUAN Peng;LIU Chen;LIANG Fa-guo;SUN Jing;ZHANG Li-fei;HU Hai-long(The 13th Research Institute of China Electronics Technology Group Corporation,Shijiazhuang,Hebei 050051,China;China Xi'an Satellite Control Center,Xian,Shanxi 710043,China)

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051 [2]中国西安卫星测控中心,陕西西安710043

出　　处：《计量学报》2022年第3期299-305,共7页Acta Metrologica Sinica

基　　金：河北省省级科技计划(206Z0201G);国家国防科技工业局技术基础(JSJL2019210B005)。

摘　　要：为解决由于不同校准方法导致无源器件在片散射参数测试结果存在偏差的问题,通过以校准准确度高的多线TRL校准方法为参考基准,比较SOLT、LRRM校准方法与其误差项的差异。充分考虑了两个端口误差项的级联关系,推导得到误差项差异的数学模型,通过参数转换计算得到无源器件在片散射参数的最大偏差。在100 MHz~67 GHz频段范围内进行了试验分析,与国外校准比较方法对比,相同校准方法的4个散射参数线性幅值偏差≤0.01。研究结果表明:该方法能够判断无源器件的在片散射参数测试结果是否真实有效,指导测试时选择合适的校准方法。In order to solve the problem of deviation in the measurement results of on-wafer scattering parameters of passive devices due to different calibration methods,by taking the multi-line TRL calibration method with high accuracy as the reference benchmark,the differences between SOLT and LRRM calibration methods error terms are compared.The cascading relation of two port error terms is fully considered,the mathematical model of error term difference is derived,and the maximum deviation on-wafer scattering parameters of the passive devices are calculated by parameter conversion.The experimental analysis is carried out in the frequency range of 100 MHz~67 GHz.Compared with foreign calibration comparison methods,the linear amplitude deviation of the four scattering parameters of the same calibration method is≤0.01.The research results show that the mentioned method can judge whether the test results of on-chip scattering parameters of passive devices are real and effective,and guide the selection of appropriate calibration methods during the test.

关 键 词：计量学 在片散射参数 校准比较方法 误差项 数学模型 最大偏差 

分 类 号：TB973[一般工业技术—计量学]