一种三端口椭圆能量聚焦型大功率微波等离子体炬  

A High-Power Microwave Plasma Torch with Three-Port Elliptical Energy Focusing

作　　者：谢政廷 朱盛颖 朱铧丞 杨阳[1] 黄卡玛[1] XIE Zheng-ting;ZHU Sheng-ying;ZHU Hua-cheng;YANG Yang;HUANG Ka-ma(College of Electronics and Information Engineering,Sichuan University,Chengdu 610065,China)

机构地区：[1]四川大学电子信息学院,四川成都610065

出　　处：《真空电子技术》2022年第2期86-91,共6页Vacuum Electronics

摘　　要：针对传统微波等离子体装置存在着功率小、处理效率低、激发场强不够高、在一定程度上制约了微波等离子体的工业应用的问题,本文提出了一种三端口椭圆聚焦型大功率微波等离子体炬装置的设计方法,根据椭圆的光学结构,并基于有限元分析法电磁仿真优化了椭圆腔体。仿真与实验结果表明该装置能量聚焦区域的电场能量通过外激发能激发出等离子体,可用于处理固体废弃物,其对于以后的大功率多端口微波等离子体装置的设计也有一定的指导意义。Low power,low processing efficiency and low excited field intensity of traditional plasma devices restrict the industrial applications of microwave plasma to some extent.A design method of high-power microwave plasma torch with three-port elliptical energy focusing is presented.According to the optical structure of the ellipse and the electromagnetic simulation based on finite element analysis,the ellipse cavity is optimized.The simulation and experimental results show that the electric field energy in the energy focusing region of the device excites the plasma through external excitation energy,which can be used to clearing up the solid waste.The research also has guiding significance for the design of high-power multi-port microwave plasma device in the future.

关 键 词：微波等离子体 大功率 多端口 多物理场 

分 类 号：TM925.54[电气工程—电力电子与电力传动]