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作 者:付刚 黄卡玛[1] 钟南亚 FU Gang;HUANG Ka-ma;ZHONG Nan-ya(College of Electronics and Information Engineering,Sichuan University,Chengdu 610065,China)
出 处:《真空电子技术》2022年第2期92-96,共5页Vacuum Electronics
摘 要:相比于直流、交流和射频等离子体,微波等离子体具有无需电极、电子密度大、电子温度高和能量效率高等优势,广泛应用于材料表面改性、污水处理、废气处理、污染物降解等众多领域。传统的零维和一维等离子体射流都不能用于处理大面积,而能处理大面积的等离子体射流装置体积又较大。因此,本文设计了一种基于带状线,用于处理大面积的小型八通道等离子体射流装置,利用电磁理论、DRUDE模型和有限元算法计算了所设计器件的尺寸,并搭建了一个实验系统,在入射微波功率为95 W时,仅检测到9 W的反射功率,与仿真结果吻合较好。Compared with DC,AC and RF plasmas,the microwave plasma has advantages of no need of electrode,high electron density,high electron temperature and high energy efficiency.It is widely used in many fields,such as material surface modification,sewage treatment,waste gas treatment,pollutant degradation and so on.Traditional zero and one-dimensional plasma jets cannot be used to process large area,while the plasma jet devices capable of large area processing always have large volumes.A miniature eight-channel plasma jet device based on strip line is designed for large area processing.The dimension of the designed device is calculated by using electromagnetic theory,DRUDE model and finite element algorithm,and the corresponding experimental system is built.When the incident microwave power of the system is 95 W,only 9 W reflected power is detected,which is in good agreement with the simulation results.
分 类 号:TM925.54[电气工程—电力电子与电力传动]
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