双加热电阻柔性MEMS流速传感器的测控电路  

Measurement and Control Circuit of Flexible MEMS Flow Sensor with Dual Heating Resistors

作　　者：涂云婷 崔峰 赵韦良 Tu Yunting;Cui Feng;Zhao Weiliang(National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai 200240,China;School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]微米/纳米加工技术国家级重点实验室,上海200240 [2]上海交通大学电子信息与电气工程学院,上海200240

出　　处：《微纳电子技术》2022年第4期341-347,共7页Micronanoelectronic Technology

基　　金：航天科学技术基金资助项目(20C-JJ02-011);上海市科委专业技术服务平台资助项目(19DZ2291103)。

摘　　要：为扩大流速传感器的测量量程和应用范围,设计并制造了一种双加热电阻柔性热膜式微电子机械系统(MEMS)流速传感器,它是由一对加热电阻(也可作为测温电阻)、一对测温电阻和一对环境测温补偿电阻组成。主要对该柔性MEMS流速传感器的测控电路进行仿真设计和风速测试实验研究。基于热温差和热损失的工作原理,使用Matlab/Simulink软件对热敏电阻进行数学建模,并使用Cadence/Pspice软件进行电路仿真分析,设计出了可适用于高速(10~30 m/s)、中速(1~10 m/s)和低速(0~1 m/s)的测控电路系统。风速测试实验实现了0~30 m/s的风速测量,结果表明,传感器的灵敏度最高为32.1 mV/(m/s),在低风速段灵敏度也可达到5.5 mV/(m/s)。该传感器可贴于曲面应用,测量范围广,环境温度适应力强。To expand the measuring range and application field of the flow sensor, a micro-electromechanical system(MEMS) flexible hot film flow sensor with dual heating resistors was designed and fabricated. It is composed of a pair of heating resistors(also used as temperature measuring resistors), a pair of temperature measuring resistors and a pair of ambient temperature measuring compensation resistors. The measurement and control circuit of the flexible MEMS flow sensor was simulated and designed, and the wind speed test experiment was researched. Based on the working principles of thermal temperature difference and heat loss, mathematical mode of thermistor was established by Matlab/Simulink software, and circuit simulation analysis was carried out by Cadence/Pspice software. The measurement and control circuit system suitable for high speed(10-30 m/s), medium speed(1-10 m/s) and low speed(0-1 m/s) was designed. The wind speed test experiment realizes the wind speed measurement of 0-30 m/s, and the experimental results show that the highest sensitivity of the sensor is 32.1 mV/(m/s), and the sensitivity can also reach 5.5 mV/(m/s) at the low wind speed. The sensor can be affixed to curved surfaces for applications, which has a wide measurement range and strong adaptability to ambient tempe-rature.

关 键 词：柔性微电子机械系统(MEMS) 流速传感器 柔性热膜 双加热电阻 测控电路 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]