FMEA在蓝宝石衬底生产周期改善中的应用研究  

Application of FMEA in Sapphire Substrate Cycle Improvement Research

作　　者：潘春荣[1] 梁家玮 谢斌晖 PAN Chun-rong;LIANG Jia-wei;XIE Bin-hui(School of Mechanical and Electrical Engineering,Jiangxi University of Science and Technology,Jiangxi Ganzhou 341000,China;Fujian Jingan Optoelectronics Co.,Ltd.,Fujian Quanzhou 362000,China)

机构地区：[1]江西理工大学机电工程学院,江西赣州341000 [2]福建晶安光电有限公司,福建泉州362000

出　　处：《机械设计与制造》2022年第5期176-180,共5页Machinery Design & Manufacture

基　　金：国家自然科学基金—混流晶圆加工自动化组合设备建模与调度优化(51665018)。

摘　　要：为了缩短某光电制造企业蓝宝石衬底生产周期,采用失效模式与影响分析(FMEA)方法,对蓝宝石衬底生产周期进行改善。首先,对蓝宝石衬底生产周期组成及工艺流程进行分析;其次,结合故障树寻找影响其生产周期的风险事件,再根据风险顺序数确定影响生产周期的关键风险事件,并制定改善对策;最后,将改善策略应用于蓝宝石衬底实际生产中,通过对比改善前后光电制造企业蓝宝石衬底生产周期状况,验证了FMEA方法在缩短蓝宝石衬底生产周期中的可行性和有效性。In order to reduce the production cycle of sapphire substrate in a photoelectric manufacturing enterprise,the failure mode and effect analysis method was adopted to improve the production cycle of sapphire substrate. Firstly,the production cycle composition and process flow were analyzed. Secondly,the risk events that affected the production cycle were found out by combining fault tree analysis,and according to the risk priority number of each risk event,the key risk events were confirmed and improvement strategies were proposed;Finally,the improvement strategies were applied to the actual production of sapphire substrate,by comparing the production cycle of sapphire substrate in photoelectric manufacturing enterprises before and after the improvement,the feasibility and effectiveness of FMEA methods in reducing the production cycle of sapphire substrate were verified.

关 键 词：蓝宝石衬底 生产周期 失效模式与影响分析(FMEA) 故障树分析 

分 类 号：TH16[机械工程—机械制造及自动化] TH186