压阻式压力传感器温度误差的插值补偿方法研究  

Research on interpolation compensation method fortemperature error of piezo-resistive pressure sensor

作　　者：贺红林[1] 许佳豪 周战洪 胡东明 李冀 He Honglin;Xu Jiahao;Zhou Zhanhong;Hu Dongming;Li Ji(School of Aeronautical Manufacturing Engineering,Nanchang Hangkong University,Nanchang 330063,China)

机构地区：[1]南昌航空大学航空制造工程学院,南昌330063

出　　处：《电子测量与仪器学报》2021年第12期1-7,共7页Journal of Electronic Measurement and Instrumentation

基　　金：江西省自然科学基金重点项目(20202ACB202003);国家自然科学基金(51665040);江西省重点研发计划(20181ACG70024)项目资助。

摘　　要：为减小环境温度变化对压阻式压力传感器实施可靠测量的不利影响,提出一种结合三次样条插值与埃尔米特插值的补偿方法。首先通过标定实验获取标定数据,采用三次样条插值建立环境温度、传感器输出电压与待测压力之间的函数关系以补偿传感器的温度误差,再借助埃尔米特插值构造输出电压与待测压力之间的映射关系描述传感器的测量特性。两种标定工况条件下压力传感器的温度补偿实验结果表明,经该方法补偿后的传感器测量最大引用误差分别为2.414×10^(-4)和6.129×10^(-4)、平均引用误差分别为2.353×10^(-5)和1.313×10^(-4)、误差方差分别为1.751×10^(-9)和1.613×10^(-8),零点温度系数分别为2.780×10^(-7)和8.862×10^(-7),灵敏度温度系数分别为1.952×10^(-6)和3.672×10^(-6),验证了该方法在不同建模数据条件下补偿性能的一致有效性。In order to reduce the adverse effect of environmental temperature change on the reliable measurement of piezoresistive pressure sensor,a compensation method combining cubic spline interpolation and Hermite interpolation is proposed in this paper.Firstly,the calibration data are obtained through the calibration experiment,and the cubic spline interpolation is used to establish the functional relationship between the ambient temperature and the output voltage of the sensor and the pressure to be measured to compensate the temperature error of the sensor.Then the Hermite interpolation is used to construct the mapping relationship between the output voltage and the pressure to be measured to describe the measurement characteristics of the sensor.The results of temperature compensation experiment under two different working conditions show that the maximum qualified error are 2.414×10^(-4)and 6.129×10^(-4)respectively,the average qualified error are 2.353×10^(-5)and 1.313×10^(-4)respectively,and the variance of qualified error are 1.751×10^(-9)and 1.613×10^(-8)respectively,zero temperature coefficients are 2.780×10^(-7)and 8.862×10^(-7),sensitivity temperature coefficients are 1.952×10^(-6)and 3.672×10^(-6),which verifies the consistent effectiveness of the compensation performance under different modeling data conditions.

关 键 词：压阻式压力传感器 温度漂移 三次样条插值 埃尔米特插值 

分 类 号：TN06[电子电信—物理电子学] TP212[自动化与计算机技术—检测技术与自动化装置]