基于图像识别的芯片引脚缺陷检测算法的研究  

Research on chip pin defect detection algorithm based on image recognition

作　　者：徐立君[1] 李嘉毅 刘佳男 张润哲 刘欣[2] 王曼维[3] XU Li-jun;LI Jia-yi;LIU Jia-nan;ZHANG Run-zhe;LIU Xin;WANG Man-wei(College of Physics,Changchun University of Science and Technology,Changchun 130022,China;College of Mathematics and Statistics Physics,Changchun University of Science and Technology,Changchun 130022,China;Information Center of Agriculture Department,Beijing 100026,China)

机构地区：[1]长春理工大学物理学院,吉林长春130022 [2]长春理工大学数学与统计学院,吉林长春130022 [3]农业部信息中心,北京100026

出　　处：《吉林师范大学学报（自然科学版）》2022年第2期67-73,共7页Journal of Jilin Normal University:Natural Science Edition

基　　金：国家自然科学基金项目(61007006)。

摘　　要：芯片封测在半导体芯片生产过程中占有重要的地位.为了检测芯片的引脚、字符和表面划痕等多种缺陷,搭建了高精度芯片图片采集装置,应用形态学和数学理论相结合的图像识别方法对芯片图像进行缺陷识别.在检测过程中首先对图像进行灰度化、二值化、自动校正处理;其次以连通域为目标,定位引脚的中心,根据坐标特点进行分类,获取引脚外接矩形的长、宽、面积等信息,同时利用闭运算和开运算对图像进行处理,并寻找封装边界,从而将芯片分割成引脚区域和字符区域;接着对引脚图像进行去噪和图像锐化;然后根据引脚图像的特征,进行基于图像像素点变化的引脚内外侧图像的切割;最后利用连通域法确定引脚位置并利用各种缺陷的特点实现各类芯片引脚缺陷的识别和检测.本芯片引脚缺陷检测方法,适用于多类型小样本芯片的引脚缺陷检测,对于基于神经网络的芯片检测方法是一种有益的补充,对于芯片的研究和生产环节的检测都具有指导意义.Chip sealing measurement plays an important role in the production of semiconductor chips.In order to detect various defects such as pins,characters and scratches on the surface of the chip,a high precision chip image acquisition device was built,and an image recognition method based on morphology and mathematics theory was used to recognize the defects of chip image.Firstly,the image was processed by grayscale,binarization and automatic correction.Secondly,the center of the pin was located in the connected area.And the length,width and area of the external rectangle of the pin were classified according to the coordinate characteristics.At the same time,the closed and open operations were used to divide image into a pin area and a character area.Thirdly,the image of the pin was denoised and sharpened,and then the inner and outer pins were segmented based on the changes of pixels in the image.Finally,the connection domain method was used to determine the position of the pins and to identify and detect all kinds of pin defects based on the characteristics of various defects.The original chip pin defect detection method is suitable for many types of small sample chips,which is a useful supplement to the neural network based on chip detection method.Moreover,it has guiding significance for the research of chip and the detection of production link.

关 键 词：图像识别 图像形态学 图像分割 引脚缺陷分类 

分 类 号：TP273.5[自动化与计算机技术—检测技术与自动化装置]