微纳米三坐标测量机三轴垂直度误差测量及建模补偿  

Measurement and Compensation Modeling of Perpendicularity Errors of Micro-nano CMM

作　　者：李瑞君[1] 李洁 何亚雄[1] 程真英[1] 黄强先[1] LI Rui-jun;LI Jie;HE Ya-xiong;CHENG Zhen-ying;HUANG Qiang-xian(Anhui Province Key Laboratory of Measuring Theory and Precision Instrument,School of Instrument Science and Opto-electronics Engineering,Hefei University of Technology,Hefei,Anhui 230009,China)

机构地区：[1]合肥工业大学仪器科学与光电工程学院测量理论与精密仪器安徽省重点实验室,安徽合肥230009

出　　处：《计量学报》2022年第4期452-456,共5页Acta Metrologica Sinica

基　　金：国家重点研发计划项目(2019YFB2004900)。

摘　　要：垂直度误差是微纳米三坐标测量机的重要误差源之一,必须对其进行高精度测量并建立垂直度误差的补偿模型。采用基于光电位置敏感器件(PSD)的测量装置,先将三轴垂直度误差转化成相应方向的直线度误差再对其进行测量,并对微纳米三坐标测量机的垂直度误差进行建模和补偿。通过对0级标准量块厚度进行测量和垂直度误差补偿,量块X、Y方向厚度测量误差分别减小了11μm和4μm,验证了垂直度误差测量方法和补偿模型的有效性。The perpendicularity error is one of an important error sources of micro-nano coordinate measuring machines(CMMs).This error should be measured with high accuracy and compensated by an effective model.The measurement setup based on PSD was used to measure the straightness errors which can be transformed into the perpendicularity errors of the micro-nano CMM.A model for perpendicularity errors of the micro-nano CMM was built and used to compensate the errors.Several 0-class gauge blocks were measured and the measuring errors in X and Y directions of the blocks were reduced by 11μm and 5μm respectively after the compensation.The correctness of the perpendicularity error measuring method and the effectiveness of the compensation model were validated.

关 键 词：计量学 微纳米三坐标测量机 垂直度误差 建模补偿 

分 类 号：TB92[一般工业技术—计量学]