基于柔性铰链的倾角传感器设计  

Design of Tilt Sensor Based on Flexible Hinges

作　　者：吕傲 傅骁[1] 李遥 张聪[1] 段发阶[1] 蒋佳佳[1] LV Ao;FU Xiao;LI Yao;ZHANG Cong;DUAN Fajie;JIANG Jiajia(State Key Laboratory of Precision Testing Technology and Instruments,Tianjin University,Tianjin 300072,China;Institute of System Engineering of China State Shipbuilding Corporation Limited,Beijing 100036,China)

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072 [2]中国船舶工业系统工程研究院,北京100036

出　　处：《传感技术学报》2022年第3期285-290,共6页Chinese Journal of Sensors and Actuators

基　　金：国家重点研发计划项目(2020YFB2010800);国家自然科学基金项目(61905175,51775377,61971307);国家科技重大专项项目(2017-V-0009);霍英东教育基金会项目(171055);中国博士后科学基金项目(2020M680878);广东省重点研发计划项目(2020B0404030001);天津市科技计划项目(20YDTPJC01660);中国航发四川燃气涡轮研究院外委课题项目(GJCZ-2020-0040,GJCZ-2020-0041)。

摘　　要：针对现有倾角传感器分辨力不足、精度不高、线性度差等问题,设计了一种使用柔性铰链连接极板和外框架进行角度传递的差动电容式倾角传感器,该传感器兼具稳定性好、分辨力高和线性度好的优点。提出了在检测能力一定的情况下通过改变结构参数获得不同分辨力和量程的倾角传感器设计方法。分析了差动式电容极板测倾角原理并进行了线性度评定。构建了结构参数对传递灵敏系数的影响模型,根据选择的结构参数设计了传感器并结合数字电容检测电路进行了验证。实验结果表明在±1000″量程范围内分辨力优于0.14″,测量误差小于±2″,线性度优于0.17%。For the insufficient resolution,low accuracy and bad linearity of existing tilt sensors,a differential capacitive tilt sensor was designed which used flexible hinges to connect the plate and the frame,it has the advantages of good stability,high resolution and good linearity.A method of tilt sensors with different resolution and range was obtained by changing the structure parameters under certain detection ability.The Principle of inclination measuring of differential capacitance sensor was analyzed and the linearity was evaluated.The model of the influence of structural parameters on the range and resolution was built.According to the selection of the sensor structure parameters a tilt sensor was designed and combined with low power capacitance detection circuit to verify its performance.The experimental results show that the resolution exceeds 0.14″,the measurement errors are less than±2″and the linearity exceeds 0.17%within measuring range of±1000″.

关 键 词：倾角传感器 差动式电容传感器 柔性铰链 电容检测 分辨力 线性度 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]