磁控溅射法制备T型柔性薄膜热电偶  

Preparation of T-type Flexible Thin Film Thermocouple by Magnetron Sputtering

作　　者：熊智淳[1] 张哲娟[2] 凌彦萃 XIONG Zhichun;ZHANG Zhejuan;LING Yancui(Division of Compulsory Verification for Measurement Instrument,Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China;Engineering Research Center for Nanophotonic and Advanced Instrument,East China Normal University,Shanghai 200062,China)

机构地区：[1]上海市计量测试技术研究院在线检测与通用计量技术研究所,上海201203 [2]华东师范大学纳光电集成与先进装备教育部工程中心,上海200062

出　　处：《中国表面工程》2022年第1期231-236,共6页China Surface Engineering

基　　金：上海市科技创新行动计划资助项目(20dz1202106)。

摘　　要：为解决测温元器件薄而不柔的问题,适应柔性测温技术需求,采用真空卷绕磁控溅射技术制备T型柔性薄膜热电偶。通过对制备过程中溅射功率和时间的研究,系统分析制备条件对柔性薄膜热电偶的薄膜厚度及表面电阻的影响,将T型柔性薄膜热电偶进行校准测试后,确定最佳制备条件。结果表明,80 W直流溅射40 min制得阳极铜膜;150 W直流溅射40 min制得阴极铜镍合金(康铜)膜,组合而成的柔性热电偶测温性能最佳。磁控溅射工艺制备厚度为0.05mm、长度为130mm以上的T型柔性薄膜热电偶,其温度测量范围可达-50.0~150.0℃,温度最大偏差仅为±0.3℃,具有良好的灵敏度及测温能力。T型柔性薄膜热电偶的可控制备,实现T型热电偶既柔又薄,减少传统测量方式引起的误差,为其大规模生产应用奠定了基础。In order to solve the problem of temperature measurement components about thin but inflexible and adapt to the requirements of flexible temperature measurement technology,T-type flexible thin film thermocouple is fabricated by vacuum magnetron sputtering with roll to roll technique.The influence of power and sputtering time on the thin film thickness and surface resistance of flexible film thermocouple is studied.The best preparation conditions of T-type flexible film thermocouple is supplied after being calibrated.The results show that the thermocouple,which is combined by copper film deposited at 80 W DC for 40 min and copper-nickel alloy film sputtered at 150 W DC for 40 min,is much better.The temperature measurement range of the flexible film thermocouple with a thickness of 0.05 mm and a length of over 130 mm reaches to-50.0~150.0℃,when the maximum temperature deviation is achieved to±0.3℃.The controllable preparation of T type flexible thin film thermocouple can make thermocouple both soft and thin,reduce the error caused by traditional measurement method,and lay a foundation for its large-scale production and application.

关 键 词：磁控溅射 柔性 薄膜 热电偶 卷对卷 

分 类 号：TB383[一般工业技术—材料科学与工程] TH811[机械工程—仪器科学与技术]