感应耦合等离子体喷涂工作参数对涂层性能影响的实验研究  

Experimental Study on the Influence of Inductively Coupled Plasma Operating Parameters on Coating Quality

作　　者：詹志华 王春华[1] 周秋娇 刘成周 赵鹏[2] Zhan Zhihua;Wang Chunhua;Zhou Qiujiao;Liu Chengzhou;Zhao Peng(Faculty of Physics Hefei University of Technology Hefei,230601,China;Institute of Plasma Physics Hefei Institutes of Physical Science Chinese Academy of Sciences,Hefei,230031,China;Shenzhen Institute of Advanced Technology Chinese Academy of Sciences Shenzhen,440305,China)

机构地区：[1]合肥工业大学电子科学与应用物理学院,合肥230601 [2]中国科学院合肥物质研究院等离子体所,合肥230031 [3]中国科学院深圳先进技术研究院,深圳440305

出　　处：《电工技术学报》2022年第11期2725-2732,共8页Transactions of China Electrotechnical Society

基　　金：国家自然科学基金面上项目(11775271)和国家自然科学基金项目(Y95FZ40191)资助。

摘　　要：感应耦合等离子体(ICP)由于无电极烧蚀污染、等离子体环境纯净,在制备高纯度陶瓷材料涂层上具有明显的技术优势。该文利用自主研制的感应耦合等离子体喷涂设备,开展碳化硼涂层制备的实验研究。并利用发射光谱仪和高速相机,对放电气体中加入氢气后的等离子体特性进行诊断。通过在等离子体放电气体中加入不同比例的氢气,研究等离子体工作参数对涂层性能的影响。采用扫描电子显微镜(SEM)、X射线衍射(XRD)和X射线荧光(XRF)分析了涂层的微观结构、物相和成分情况。结果表明,在放电气体中加入氢气会导致等离子体的宏观气体温度升高,从而提高喷涂粉末的表面熔融率;在放电气体中加入0.7L/min氢气时,制备的涂层结合强度最大,而且等离子体制备过程不会改变碳化硼的晶体结构。通过对比研究,得到最优化的制备参数,为该自主技术的工艺参数摸索提供重要的实验依据。Inductively coupled plasma(ICP)has obvious technical advantages in the preparation of high purity ceramic coatings because of the absence of electrode ablation pollution and the purity of plasma environment.In this paper,the experimental study on the preparation of boron carbide coating was carried out with the self-developed inductively coupled plasma spraying equipment.The emission spectrometer and high speed camera were used to diagnose the plasma characteristics after adding hydrogen into the discharge gas.The effects of plasma working parameters on the quality of the coating were studied by adding hydrogen in different proportions into the plasma discharge gas.The microstructure,phase and composition of the coating were analyzed by scanning electron microscopy(SEM),X-ray diffraction(XRD)and X-ray fluorescence(XRF).The results show that the addition of hydrogen in the discharge gas can increase the macroscopic gas temperature of plasma,and thus increase the surface melting rate of the sprayed powder.When 0.7L/min hydrogen was added into the discharge gas,the bonding strength of the coating was the highest,and the crystal structure of boron carbide was not changed during the plasma preparation process.Through comparative study,the optimum preparation parameters were obtained,which provided an important experimental basis for exploring process parameters of the independently developed technology.

关 键 词：感应耦合等离子体 氢气 放电气体 碳化硼涂层 

分 类 号：O539[理学—等离子体物理]