快速响应的微型色谱柱及GC谱线拟合方案  

Fast Response Micro Chromatographic Column and GC Spectral Line Fitting Scheme

作　　者：王晓雨 王卓然 陈裕欣 王艳芳 侯中宇 Wang Xiaoyu;Wang Zhuoran;Chen Yuxin;Wang Yanfang;Hou Zhongyu(National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai 200240,China;School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]微米/纳米加工技术国家级重点实验室,上海200240 [2]上海交通大学电子信息与电气工程学院,上海200240

出　　处：《微纳电子技术》2022年第5期432-436,444,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61204069,61274118,11605112);重点实验室基金资助项目(6142805010802);上海市科委项目(15DZ1160800,17XD1702400)。

摘　　要：采用激光刻蚀技术加工1 mm厚硅双面抛光片实现了蛇形沟道布局的微型色谱柱嵌刻基底,经涂覆固定相、封装后加工制作成新型嵌刻基底的微型色谱柱。该工艺具有加工周期短、成本低的优势。该新型色谱柱在甲醇与二氯甲烷的混合物的分离实验中能够快速响应,二氯甲烷和甲醇的保留时间分别为0.943 min和4.547 min。针对气相色谱(GC)谱线存在的色谱重叠峰问题,采用Nelder-Mead算法进行高斯曲线拟合,选择MATLAB函数通过迭代找到最优解,该算法结构简单,能够分离出清晰的高斯峰。该拟合方案对双高斯峰的重叠色谱图拟合度达到0.977,误差率为2.482%。Laser etching technology was used to process 1 mm thick silicon double-sided polished wafer to realize the micro chromatographic column embedded substrate with serpentine channel layout.After coating the stationary phase and packaging,the micro chromatographic column with new embedded substrate was fabricated.The process has the advantages of short processing cycle and low cost.The new chromatographic column can respond quickly to the separation experiment of methanol and dichloromethane mixtures,and the retention time of dichloromethane and methanol are 0.943 min and 4.547 min,respectively.For the chromatographic overlapping peak problem of the gas chromatography(GC)spectrum line,Nelder-Mead algorithm was used to fit Gaussian curve,and MATLAB function was selected to find the optimal solution through iteration.The algorithm has a simple structure and can separate clear Gaussian peak.The fitting degree of the overlapping chromatogram with double Gaussian peaks fitted by the fitting scheme reaches 0.977 and the error rate is 2.482%.

关 键 词：微型色谱柱 硅基底 双面抛光片 气相色谱(GC) 快速响应 

分 类 号：TN305.7[电子电信—物理电子学] O657.71[理学—分析化学]