集成电路制造用制冷机低温泵发展现状  

Current Status of Refrigerator Cryopump for IC Manufacturing

作　　者：冯欣宇[1,2] 杨杨 FENG Xin-yu;YANG yang(Vacree Technologies Co.,Ltd.,Hefei 230088,China;The 16th Research Institute of China Electronics Technology Group Corporation,Hefei 230088,China)

机构地区：[1]安徽万瑞冷电科技有限公司,安徽合肥230088 [2]中国电子科技集团公司第十六研究所,安徽合肥230088

出　　处：《真空》2022年第2期42-47,共6页Vacuum

摘　　要：以GM制冷机为核心部件的低温泵是一种超高真空获得设备,凭借其自身的特点与优势,已广泛应用于集成电路制造工艺与设备中。近年来,中国集成电路制造装备及成套工艺快速发展,作为重要零部件的低温泵需求量也随之增大。介绍了国内集成电路制造中进口低温泵产品的技术发展现状,并对比了不同产品的技术特点。阐述了国产低温泵进军集成电路制造业的历程与现状。The cryopump with GM refrigerator as the core component is a kind of ultra-high vacuum acquisition equipment.Owing to its characteristics and advantages, it has been widely used in integrated circuit manufacturing processes and equipment.In recent years, with the rapid development of China ’ s integrated circuit manufacturing equipment and complete sets of technology, the demand for cryopumps as important components is also increasing. The technical development status of imported cryopump products in domestic integrated circuit manufacturing is introduced, and the technical characteristics of different products are compared. The history and current situation of domestic cryopumps entering the integrated circuit manufacturing industry are described.

关 键 词：集成电路 低温泵 发展现状 

分 类 号：TP23[自动化与计算机技术—检测技术与自动化装置]