MEMS光纤温度氢气传感器在油状态监测中的应用研究  被引量:2

Study on application of MEMS optical fiber temperature-hydrogen sensor in oil state monitoring

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作  者:赵乐 贾雅君[2] 江俊杰 席东民[1] 刘林钊 金之俭[2] ZHAO Le;JIA Yajun;JIANG Junjie;XI Dongmin;LIU Linzhao;JIN Zhijian(College of Electric Power,Inner Mongolia University of Technology,Huhhot 010010,China;School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区:[1]内蒙古工业大学电力学院,内蒙古呼和浩特010010 [2]上海交通大学电子信息与电气工程学院,上海200240

出  处:《传感器与微系统》2022年第6期52-55,60,共5页Transducer and Microsystem Technologies

基  金:上海交通大学“新进青年教师启动计划”资助项目(21X010500824)。

摘  要:通过将微机电系统(MEMS)加工技术与光纤传感器技术相结合的方法,将温度感知模块和氢气感知模块集成在温度氢气MEMS光纤复合传感器内部,并在25号绝缘油中完成油温和油中溶解氢气的可行性验证实验。实验结果表明:温度感知模块在35~85℃的绝缘油温度范围内有良好的线性度,其灵敏度为14.5 pm/℃;氢气感知模块对油中溶解氢气有较强的响应,且完成氢气体积分数测量后,光谱峰值可恢复至初始状态。验证了该复合传感器在油中气体检测应用的可行性。Temperature and hydrogen sensing modules are integrated into a temperature-hydrogen MEMS optical fiber composite sensor by combining micro-machining technology with optical fiber sensor technology,and the feasibility test of oil temperature and dissolved hydrogen in oil is completed in 25th insulating oil.The experimental results show that the temperature sensing module has good linearity in the temperature range of 35~85℃,and its sensitivity is 14.5 pm/℃.The hydrogen sensing module has a strong response to the dissolved hydrogen in the oil,and the peak value of the spectrum can return to the initial state after the hydrogen concentration measurement.Feasibility of gas detection application of the composite sensor in oil is verified.

关 键 词:微机电系统 光纤 传感器 温度 氢气含量 在线监测 

分 类 号:TP212[自动化与计算机技术—检测技术与自动化装置]

 

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