磁控溅射法制备Au薄膜及真空载流摩擦学行为研究  

Preparation and Vacuum Current-Carrying Tribological Behavior of Au Film by Magnetron Sputtering

作　　者：李晓栋 吉利[2] 鞠鹏飞 李红轩[2] 周惠娣[2] 陈建敏[2] 苟学强[1] 段文山[1] LI Xiaodong;JI Li;JU Pengfei;LI Hongxuan;ZHOU Huidi;CHEN Jianmin;GOU Xueqiang;DUAN Wenshan(School of Physics and Electronic Engineering,Northwest Normal University,Gansu Lanzhou 730070,China;Key Laboratory of Science and Technology on Wear and Protection of Materials,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Gansu Lanzhou 730000,China;Shanghai Aerospace Equipments Manufacturer Co,Ltd,Shanghai 200245,China)

机构地区：[1]西北师范大学物理与电子工程学院,甘肃兰州730070 [2]中国科学院兰州化学物理研究所材料磨损与防护重点实验室,甘肃兰州730000 [3]上海航天设备制造总厂有限公司,上海200245

出　　处：《摩擦学学报》2022年第2期283-293,共11页Tribology

基　　金：国家自然科学基金(51775537,U1637204);中国科学院青年创新促进会(2016368)资助。

摘　　要：针对空间滑动电接触金基润滑涂层在制备方法以及失效机理认识方面存在的不足,探索采用绿色磁控溅射法制备金薄膜.研究了偏压对薄膜微观结构、力学以及真空载流摩擦学性能的影响规律;建立了真空载流服役工况摩擦试验评价条件,可实现接触电流噪音的实时监测,进一步对比传统电镀金涂层,研究了其真空载流摩擦磨损行为差异、主要影响因素及作用机制.结果表明:在适中的偏压下,薄膜晶粒尺寸小,结构致密光滑,具有高的结合力、硬度、耐磨性以及低的接触电流噪音.相比于电镀法,磁控溅射法制备的金膜表现出明显光滑致密的结构特征,硬度、磨损率和接触电流噪音大幅改善.其中光滑致密的结构是抑制微电弧产生的关键因素,可有效减少电弧侵蚀失效.In the space equipment system,the sliding electrical contact parts are widely used,which plays an important role in the current switching,breaking,diversion and isolation of the circuit system.With the development of equipment and the increasing demands of the harsh application conditions,the service life and other properties of space conductive lubricating materials in service have shown obvious deficiencies.The reasons may be as follows.First,the gold-based conductive material(lubricating and coating)is mainly prepared by electroplating method at present.The film has some obvious weakness such as the coarse grain,the loose structure,the rough surface,the low mechanical properties and the insufficient life.Furthermore,the process of electroplating involves environmental pollution.Second,the service environment of space conductive lubricating materials is very complex and harsh.In addition to the conventional mechanical wear problems,it also involves the interactive coupling damage of high vacuum,arc and other factors.Moreover,the failure mechanism of friction and wear is very complicated,and its understanding is not enough presently.In addition,conventional friction device can not evaluate such a complex process.The establishment of vacuum current-carrying friction test conditions can completely simulate the real service conditions of space sliding electrical contact components,and it is very necessary for the study to reveal the friction and wear mechanism of space sliding electrical contact.A green magnetron sputtering method is used to prepare gold films in view of the shortcomings in the preparation method and the understanding of failure mechanism of space sliding electric contact gold-based lubricating coatings.The influence of bias voltage on films microstructure,mechanics and tribological properties of vacuum current-carrying was studied.The evaluation conditions of vacuum current-carrying friction test which can simulate the real service condition were established,and the real-time measurement of contac

关 键 词：磁控溅射技术 Au薄膜 偏压 真空载流摩擦 电镀Au 

分 类 号：TH117.3[机械工程—机械设计及理论]