射频等离子体压力传感器及其在动态压力测量中的应用  

Radio-frequency discharge plasma pressure sensor and its application in dynamic pressure measurement

作　　者：宋权斌 莫辛 李帆[2,3,4] 杜娟[2,3,4,5] 罗海云[6] 聂超群[2,3,4,5] SONG Quanbin;MO Xin;LI Fan;DU Juan;LUO Haiyun;NIE Chaoqun(Changsha University of Science and Technology,Changsha 410114 China;Innovation Academy for Light-duty Gas Turbine CAS,Beijing 100190 China;Key Laboratory of Advanced Energy and Power Institute of Engineering Thermophysics(IET)Chinese Academy of Sciences(CAS),Beijing 100190 China;Advanced Gas Turbine Laboratory IET CAS,Beijing 100190 China;University of Chinese Academy of Sciences,Beijing 100190 China;Department of Electrical Engineering Tsinghua University,Beijing 100084 China)

机构地区：[1]长沙理工大学,湖南长沙410114 [2]中国科学院工程热物理研究所先进燃气轮机实验室,北京100190 [3]中国科学院先进能源动力重点实验室(工程热物理研究所),北京100190 [4]中国科学院轻型动力创新研究院 [5]中国科学院中国科学院大学,北京100190 [6]清华大学电机工程与应用电子技术系,北京100084

出　　处：《南昌大学学报（理科版）》2022年第2期256-265,共10页Journal of Nanchang University(Natural Science)

基　　金：国家自然科学基金资助项目(51727810);中国科学院仪器研制项目(YJKYYQ20170054);湖南省教育厅科学研究项目(18C0201)。

摘　　要：为精确测量高温高压严苛环境下的动态压力数据,本文设计了一种基于射频等离子体原理的压力传感器,并研究了该传感器在不同电源输出功率时对气压变化的响应规律,及不同温度环境下的工作特性,最后利用该传感器在低速轴流压气机实验台上进行了叶顶动态压力场的测量。实验结果表明,射频等离子体压力传感器电极间隙为220μm时,气压从0.4 atm升高到4.5 atm,灵敏度为0.22 V/kPa;标准大气压下环境温度从25℃上升到400℃时,传感器两端维持电压基本不变,说明该传感器在此温度范围下不具有温度敏感性;低速轴流压气机叶顶动态压力场测量实验结果表明,等离子体压力传感器和Kulite压阻式传感器具有同样捕捉叶片通过频率和叶顶泄漏流的自激非定常特征频率的能力。To acquire the accurate dynamic pressure data from high temperature and high pressure environment,a pressure sensor based on radio-frequency plasma theory was designed and investigated in this paper.Firstly,its response characteristics to pressure variation were studied at different power supply and different environmental temperature.Then it was applied to measure the endwall static pressure in a low speed axial compressor.The experiment results showed that when the electrode gap was 220μm,the pressure sensitivity was 0.22 V/kPa.The maintaining discharge voltage had barely changed as the temperature increased from 25℃to 400℃.From the dynamic pressure measurement experiment,it turned out that the plasma pressure sensor had the same ability comparing with Kulite to capture the blade passing frequency and self-excited unsteady characteristic frequency of the tip leakage flow.

关 键 词：射频等离子体 压力传感器 温度敏感性 动态测量 

分 类 号：V231.3[航空宇航科学与技术—航空宇航推进理论与工程] TM213[一般工业技术—材料科学与工程]