MEMS法布里-珀罗滤波芯片及其光谱探测应用研究进展  

Research Progresses of MEMS Fabry-Perot Filtering Chips and Their Applications for Spectral Detection

作　　者：周奎 单政 张倩 王谢君[1,2] 周健 邓宸伟 虞益挺[1,2] Zhou Kui;Shan Zheng;Zhang Qian;Wang Xiejun;Zhou Jian;Deng Chenwei;Yu Yiting(Ningbo Institute,Research&Development Institute in Shenzhen,School of Mechanical and Engineering,Northwestern Polytechnical University,Xi’an,Shaanxi 710072,China;Key Laboratory of Micro/Nano Systems for Aerospace(Ministry of Education),Key Laboratory of Micro and Nano Electro-Mechanical Systems of Shaanxi Province,Northwestern Polytechnical University,Xi'an,Shaanxi 710072,China;Xi’an Modern Control Technology Research Institute,Xi'an,Shaanxi 710065,China;School of Information and Electronics,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]西北工业大学宁波研究院,深圳研究院,机电学院,陕西西安710072 [2]西北工业大学空天微纳系统教育部重点实验室,陕西省微纳机电系统重点实验室,陕西西安710072 [3]西安现代控制技术研究所,陕西西安710065 [4]北京理工大学信息与电子学院,北京100081

出　　处：《光学学报》2022年第8期1-22,共22页Acta Optica Sinica

基　　金：国家自然科学基金(51975483);军科委基础加强项目;陕西省重点研发计划(2020ZDLGY01-03);深圳学科布局项目(JCYJ20180508151936092);宁波市自然科学基金(202003N4033)。

摘　　要：光谱探测技术在未来智能装备中发挥着视觉检测、理化分析和过程控制等智能识别的作用,广泛应用于食品安全、医学诊断、环境监测、防伪鉴别、植物病害抑制、预警侦察等领域。传统光谱探测系统因受限于分光元件而存在体积大、成本高和定制化能力有限等问题。基于微机电系统(MEMS)技术的法布里-珀罗(FP)滤波芯片为微型化、低成本和定制化的光谱探测系统提供了新的解决途径。近三十年来,针对实用化MEMS-FP滤波芯片的研究已取得长足的进展,并已应用于实际的微小型光谱探测系统中,但在芯片制造、器件性能和系统集成方面仍面临诸多要攻克的难题。对MEMS-FP滤波芯片的原理和性能、器件分类、实用化研究进展进行了综述,并分析了目前存在的问题和未来的发展趋势。Spectral detection technology plays important roles in intelligent identification of next-generation smart equipment,such as visual inspection,physico-chemical analysis,and process control,which can be widely used in the fields of food safety,medical diagnosis,environmental monitoring,anti-counterfeiting identification,plant disease suppression,and military reconnaissance and early warning.Traditional spectral detection systems are limited by dispersion elements,which suffer from large volume,high cost,and poor customization capability.Fabry-Perot(FP)filtering chips based on micro-electro-mechanical system(MEMS)technology provide a new solution for the miniaturized,low-cost,and customizable spectral detection systems.In recent three decades,considerable progresses have been achieved in the area of practical MEMS-FP filtering chips,which have been widely applied to miniaturized spectral detection systems.However,many problems need to be solved in the aspects of chip manufacturing,performance improvement,and system integration.In this paper,the principle and performance,device classification,and application progresses of MEMS-FP filtering chips are reviewed.And also,the existing problems and development trends in the future are discussed.

关 键 词：光学器件 法布里-珀罗滤波芯片 光谱探测 光谱成像 分光元件 

分 类 号：O433[机械工程—光学工程]