基于X射线近场散斑的波前检测技术研究现状  

Present Research Status of X-Ray Near-Field Speckle Based Wavefront Metrology

作　　者：李凡 康乐[1,2] 杨福桂 姚春霞[1] 朱佩平 李明[1] 盛伟繁[1] Li Fan;Kang Le;Yang Fugui;Yao Chunxia;Zhu Peiping;Li Ming;Sheng Weifan(Institute of High Energy Physics,Chinese Academy of Sciences,Beijing 100049,China;Spallation Neutron Source Science Center,Guangdong 523803,China)

机构地区：[1]中国科学院高能物理研究所,北京100049 [2]散裂中子源科学中心,广东东莞523803

出　　处：《光学学报》2022年第8期23-42,共20页Acta Optica Sinica

基　　金：广东省自然科学基金(2017A030313039)

摘　　要：第四代同步辐射光源为多个研究领域提供了亮度和相干度更高、性能更加优异的X射线。为了充分发挥这些光束的潜力,需要精确的光束线装调和高质量的X射线光学元件。波前检测技术在这些方面发挥着重要作用。近10年来快速发展起来的基于X射线近场散斑的波前检测技术,具有简便易行、测量精度高等优点。利用散斑在深菲涅耳区形状和大小不变的特性,在参考图和样品图之间进行互相关计算,提取出入射波、待测光学元件透射波或反射波的波前信息。综述了利用X射线近场散斑开展波前检测的研究现状,介绍了X射线散斑追迹技术、X射线散斑向量追迹技术、X射线散斑扫描技术、自相关X射线散斑扫描技术、通用调制图样分析技术和Ptychographic X射线散斑追迹技术的原理、实验流程,以及各自的优势和应用。The fourth generation synchrotron radiation light source provides X-rays with higher brightness and coherence,and better performance for many research fields.To access the full potential of these beams,accurate beamline alignment and high-quality X-ray optics are required.Wavefront metrology plays an important role in these aspects.X-ray near-field speckle based wavefront metrology,which has been developed rapidly in the past 10 years,has the advantages of simplicity and high measurement accuracy.Based on the property of not changing in shape and size of the speckle in the deep Fresnel region,the cross-correlation between the reference image and the sample image is calculated,and the wavefront information of the incident wave,the transmitted wave or the reflected wave of the optics to be measured is extracted.The present research status of X-ray near-field speckle based wavefront metrology is summarized.The principles,experimental procedures,advantages and applications of X-ray speckle tracking,X-ray speckle vector tracking,X-ray speckle scanning,self-correlation X-ray speckle scanning,unified modulated pattern analysis and Ptychographic X-ray speckle tracking are introduced.

关 键 词：X射线光学 同步辐射 波前检测 X射线近场散斑 面形检测 

分 类 号：O434.1[机械工程—光学工程]