基于磁控溅射装置工艺要求的可重构控制系统设计  

Design of a Reconfigurable Control System Based on the Requirement of Magnetron Sputtering Devices

作　　者：吴建军[1] 刘荒 李春梅 WU Jianjun;LIU Huang;LI Chunmei(College of Physics Science and Technology,Shenyang Normal University,Shenyang 110034,China;Shenyang Academy of Instrumentation Science Co.,Ltd.,Shenyang 110043,China)

机构地区：[1]沈阳师范大学物理科学与技术学院,沈阳110034 [2]沈阳仪表科学研究院有限公司,沈阳110043

出　　处：《真空科学与技术学报》2022年第5期404-409,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金面上项目(11674233)。

摘　　要：为了提高磁控溅射装置面对不同工艺需求的适应能力,设计了一种基于西门子PLC以及LABVIEW的控制系统。该系统中不固化具体的工艺流程而是提供工艺流程编辑接口以及对自定义工艺数据进行解析和执行的功能,实现工艺的可重构。本文在实际需求的基础上完成了系统的硬件架构、软件编程以及人机交互界面的设计;通过实践验证了工艺可重构对提高设备的工艺适应性有较大的帮助。An automatic control system based on Siemens PLC and LABVIEW was designed to improve the adaptability of magnetron sputtering devices to different process requirements.The system does not solidify the specific process flow but provides the process flow editing interface and the function of parsing and executing the userdefined process data,so as to realize the reconfiguration of the process.This paper completes the design of the system’s hardware architecture,software programming and HMI based on actual needs.It has been verified through practice that process reconfiguration is of great help in improving the process adaptability of equipment.

关 键 词：磁控溅射 西门子PLC 可重构 人机界面 

分 类 号：TP23[自动化与计算机技术—检测技术与自动化装置]