飞秒激光时空整形电子动态调控加工微光学元件  

Machining of Micro-Optical Elements Using Electrons Dynamics Controlled Temporally/Spatially Shaped Femtosecond Laser

作　　者：吴梦楠 李晓炜 向志昆 张乐仪 杨炎培 王志鹏 刘洋[2] Wu Mengnan;Li Xiaowei;Xiang Zhikun;Zhang Leyi;Yang Yanpei;Wang Zhipeng;Liu Yang(School of Mechatronical Engineering,Beijing Institute of Technology,Beijing 100081,China;School of Mechanical Engineering,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]北京理工大学机电学院,北京100081 [2]北京理工大学机械与车辆学院,北京100081

出　　处：《中国激光》2022年第10期99-118,共20页Chinese Journal of Lasers

基　　金：国家自然科学基金(52075041);北京市自然科学基金(JQ20015);北京高校卓越青年科学家计划(BJJWZYJH01201910007022)。

摘　　要：飞秒激光加工具有精度高、无污染、材料适用性广、热效应小等特点,在加工微光学元件方面有着独特的优势。通过对飞秒激光进行时间和空间整形,调控电子动态及其后续的电子-声子作用过程,能够有效提高加工精度和加工效率,解决微光学元件在实际加工中的质量和成本问题。本文以微透镜、光栅和波带片为例,综述了常见微光学元件的飞秒激光加工现状,介绍了时空整形飞秒激光调控电子动态的基本原理,总结了飞秒激光进行时空整形的主要实现途径,展示了这些方法在加工微光学元件上的典型应用和研究进展,最后分析讨论了时空整形飞秒激光用于加工微光学元件所面临的挑战和今后的研究重点。Significance Micro-opticaldevices have the characteristics of miniaturization and integration compared with ordinaryopticaldevices owing to their extremely small size.Therefore,they have irreplaceable application value and importancein optical communication,optical display,optical processing,and optical information storage.Femtosecond laser processing is flexible,efficient,and has several materials to use.As the laser is compressed for a short time,it produces a very high-power density.Furthermore,the interaction between the laser and material is nonlinear and nonequilibrium.Therefore,controlling the interaction process between laser and electrons,especiallythe local electron dynamics,is necessary for quality optimization of laser processing.Jiang et al.proposed a new electronic dynamic control(EDC)technique,whose core idea is to control the local transient electron dynamicsbycontrollingthe amplitude,phase,and polarization of the femtosecond laser in space and time.This will regulatethe local transient electron dynamics of the material,and change the morphology and properties of the material.Based on EDC technology,laser processing quality and processing efficiency can be effectively optimized,which is of great significance in the processing of micro-optical devices.Progress Themain methods of femtosecond laser processing of micro-nano-optical components include both lasercontrolled material properties and morphology.Laser-controlled material properties alter the local refractive index of the material to fabricate microlenses,as shown in Figure 2(d).Notably,etching assistance can be further used.In Figure1(a),Huanget al.obtain vibrantly colored gratings by using laser-induced nonablative periodic modification and etching of silicon.Figure 2(a)shows the method of laser-controlled material morphology in which two-photon polymerizationis used to process a multilayer microlens group,or as shown in Figure 3(f),where direct writing subtraction is used.The main methods used in EDC technology to improve processing effici

关 键 词：激光技术 飞秒激光 电子动态调控 微孔加工 时空整形 微光学元件 

分 类 号：O436[机械工程—光学工程]