准分子激光光刻光源关键技术及应用  

Key Technologies and Applications of Excimer Laser as Light Sources in Lithography

作　　者：江锐 Jiang Rui(Optoelectronic Technology R&D Department,Beijing Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;Beijing RSLaser Opto-Electronics Technology Co.,Ltd,Beijing 100176,China)

机构地区：[1]中国科学院北京微电子研究所光电技术研发中心,北京100029 [2]北京科益虹源光电技术有限公司,北京100176

出　　处：《激光与光电子学进展》2022年第9期327-344,共18页Laser & Optoelectronics Progress

摘　　要：准分子激光光源在光刻、工业制造、医疗和科研领域都有广泛的应用,特别是其波长、线宽、能量与剂量等指标在光刻领域有很大的优势,可以为光刻机带来更小的图像分辨率和更均匀的曝光图形。现阶段准分子激光器已用于7 nm光刻工艺,并日趋完善,带来更低的运营成本、更高的产率和产量,从而推动整个半导体制造产业的发展。首先简单介绍了准分子激光原理,回顾了准分子激光的发展历史,调研了准分子激光在光刻上的应用现状,及国外准分子光刻光源的主流机型,继而重点阐述了部分应用在光刻中的准分子激光器的关键技术,并展望了准分子激光在光刻及集成电路制造其他环节应用的未来趋势,为我国准分子激光的自主可控发展提供有益借鉴。Excimer lasers are widely used in lithography,industrial manufacturing,and medical and scientific fields.Particularly,their indexes such as wavelength,linewidth,energy and dose have great advantages in the field of lithography,therefore can help the lithography machine to obtain smaller image resolution and smoother light exposure.Now excimer lasers have already been used in 7 nm node in semiconductor manufacturing,and are still improving to drive for the lower cost-of-ownership and higher productivity and yield,which promote the development of the whole semiconductor manufacturing industry.Firstly,this paper briefly introduces the principle of excimer lasers,reviews the development history of excimer lasers,investigates the application status of excimer laser in lithography and the mainstream models of foreign excimer lithography light sources,and then focuses on some key technologies of excimer lasers used in lithography.The future trend of applications of excimer lasers in lithography and other links of integrated circuit manufacturing is prospected,which provides a useful reference for the independent and controllable development of excimer lasers in China.

关 键 词：光学设计与制造 准分子激光 光刻 能量与剂量 中心波长与线宽 

分 类 号：TN405[电子电信—微电子学与固体电子学]