A nanoforest-based humidity sensor for respiration monitoring  

作　　者：Guidong Chen Ruofei Guan Meng Shi Xin Dai Hongbo Li Na Zhou Dapeng Chen Haiyang Mao 

机构地区：[1]Institute of Microelectronics of Chinese Academy of Sciences,Beijing,China [2]University of Chinese Academy of Sciences,Beijing,China [3]Jiangsu Hinovaic Technologies Co,Ltd,Wuxi,China

出　　处：《Microsystems & Nanoengineering》2022年第2期107-117,共11页微系统与纳米工程（英文）

基　　金：supported in part by the National Natural Science Foundation of China(Grant Nos 61771467,62022081 and 61974099);Youth Innovation Promotion Association,Chinese Academy of Sciences(Grant No.2018153);Key-Area Research and Development Program of Guangdong Province.(Grant No.2019B010117001).

摘　　要：Traditional humidity sensors for respiration monitoring applications have faced technical challenges,including low sensitivity,long recovery times,high parasitic capacitance and uncalibrated temperature drift.To overcome these problems,we present a triple-layer humidity sensor that comprises a nanoforest-based sensing capacitor,a thermistor,a microheater and a reference capacitor.When compared with traditional polyimide-based humidity sensors,this novel device has a sensitivity that is improved significantly by 8 times within a relative humidity range of 40-90%.Additionally,the integration of the microheater into the sensor can help to reduce its recovery time to 5 s.The use of the reference capacitor helps to eliminate parasitic capacitance,and the thermistor helps the sensor obtain a higher accuracy.These unique design aspects cause the sensor to have an excellent humidity sensing performance in respiration monitoring applications.Furthermore,through the adoption of machine learning algorithms,the sensor can distinguish different respiration states with an accuracy of 94%.Therefore,this humidity sensor design is expected to be used widely in both consumer electronics and intelligent medical instrument applications.

关 键 词：humidity SENSOR OVERCOME 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]