单层MoS_(2)薄膜的NaCl双辅助生长方法  

Growth of monolayer MoS_(2) films dual-assisted by NaCl

作　　者：王奋陶 樊腾 张仕雄 孙真昊 付雷 贾伟[1] 沈波[2] 唐宁[2] Wang Fen-Tao;Fan Teng;Zhang Shi-Xiong;Sun Zhen-Hao;Fu Lei;Jia Wei;Shen Bo;Tang Ning(Key Laboratory of Interface Science and Engineering for Advanced Materials,Ministry of Education,Taiyuan University of Technology,Taiyuan 030024,China;State Key Laboratory of Artificial Microstructure and Mesoscopic Physics,School of Physics,Peking University,Beijing 100871,China)

机构地区：[1]太原理工大学,新材料界面科学与工程教育部重点实验室,太原030024 [2]北京大学物理学院,人工微结构和介观物理国家重点实验室,北京100871

出　　处：《物理学报》2022年第12期481-488,共8页Acta Physica Sinica

基　　金：国家重点研发计划(批准号:2018YFE0125700);国家自然科学基金(批准号:61574006,61927806)资助的课题。

摘　　要：以单层二硫化钼(MoS_(2))为代表的过渡金属硫族化合物半导体材料具有良好的光学、电学性质,近十年来引起了人们广泛的研究兴趣.合成高质量单层MoS_(2)薄膜是科学研究及工业应用的基础.最近科研人员提出了盐辅助化学气相沉积生长单层薄膜的方法,大大提高了单层MoS_(2)薄膜的生长速度及晶体质量.本文基于此方法,提出利用氯化钠(NaCl)的双辅助方法,成功制备了高质量的单层MoS_(2)薄膜.光致发光(PL)谱显示其发光强度比无NaCl辅助生长的样品有了明显的提高.本文提出的NaCl双辅助生长方法为二维材料的大规模生长提供了思路.In recent years,transition metal dichalcogenides materials represented by monolayer molybdenum disulfide(MoS_(2))have aroused great interest due to their excellent optical and electrical properties.The synthesis method of high-quality monolayer MoS_(2)film is a key problem for scientific research and industrial application.Recently,researchers have proposed a salt-assisted chemical vapor deposition method for growing the monolayer films,which greatly promotes the growth rate and quality of monolayer film.By using this method,we design a growth source of semi-enclosed quartz boat,and successfully obtain high-quality monolayer MoS_(2)films by using the double auxiliary action of sodium chloride(NaCl).Scanning electron microscopy shows the excellent film formation,and the photoluminescence spectra show that the luminescence intensity is significantly higher than that of the sample grown without NaCl.The NaCl double-assisted growth method proposed in this study can reduce the growth temperature of MoS_(2),shorten the growth time,and improve the optical properties of the films.Besides,the operation is simple and the cost is low,which provides an idea for growing the large-scale two-dimensional materials.

关 键 词：二硫化钼 化学气相沉积 氯化钠双辅助作用 单层薄膜生长 

分 类 号：O782[理学—晶体学] TB383.2[一般工业技术—材料科学与工程]