计量型激光椭偏仪初始入射角校准方法的研究  

Research on Calibration Method of Initial Incident Angle of Metrological Laser Ellipsometer

作　　者：黎雄威 李琪[2] 纪峰[1] 李适[2] 李伟[2] 黄鹭[2] 施玉书[2] 皮磊[2] LI Xiong-wei;LI Qi;JI Feng;LI Shi;LI Wei;HUANG Lu;SHI Yu-shu;PI Lei(Anhui Province Key Laboratory of Measuring Theory and Precision Instrument,Hefei University of Technology,Hefei,Anhui 230009,China;National Institute of Metrology,Beijing 100029,China)

机构地区：[1]合肥工业大学测量理论与精密仪器安徽省重点实验室,安徽合肥230009 [2]中国计量科学研究院,北京100029

出　　处：《计量学报》2022年第5期571-577,共7页Acta Metrologica Sinica

基　　金：国家质量基础的共性技术研究与应用(2017YFF0204705)。

摘　　要：为保证计量型激光椭偏仪测量结果的准确性,研究了一种初始入射角校准方法,通过线性位移台带动CCD相机进行一维运动,其运动轴作为空间线性辅助参考量,实现了椭偏仪的入射激光光轴与自准直仪光轴的90°校准。结果表明:采用该方法校准计量型激光椭偏仪的初始入射角,光轴俯仰角偏差<0.05°,偏摆角偏差<0.09°;校准后,对标称值为102.10 nm的Si上SiO_(2)膜厚标准片进行测量,示值误差<0.4 nm,提升了计量型激光椭偏仪测量校准服务的准确性。To ensure the accuracy of the measurement results of the metrology-type laser ellipsometer,an initial incidence angle calibration method is investigated,the incident laser optical axis of the ellipsometer is calibrated at 90°to the optical axis of the self-collimator by means of a linear displacement stage driving the CCD camera in one-dimensional motion,and its motion axis is used as a spatial linear auxiliary reference quantity.The results show that the initial incidence angle of the metrology-type laser ellipsometer is calibrated by this method,and the deviation of the optical axis pitch angle is less than 0.05°and the deviation of the deflection angle is less than 0.09°.The calibration results show that the calibration error of the SiO_(2) film thickness standard on Si with the nominal value of 102.10 nm is less than 0.4 nm.The research work has improved the accuracy of the measurement and calibration service of the metrology-type laser ellipsometer.

关 键 词：计量学 计量型激光椭偏仪 椭偏测量 初始入射角 校准 微纳米薄膜 

分 类 号：TB922[一般工业技术—计量学]