基于蝶翼式MEMS振动传感器的轴承故障信号检测方法  

Bearing Fault Signal Detection Method Based on Butterfly MEMS Vibration Sensor

作　　者：蒲金飞 侯占强[1] 吴学忠[1] 肖定邦[1] 曾承志 陈伟琪 李修文 PU Jinfei;HOU Zhanqiang;WU Xuezhong;XIAO Dingbang;ZENG Chengzhi;CHEN Weiqi;LI Xiuwen(College of Intelligence Science and Engineering,National University of Defense Technology,Changsha Hunan 410073;Tang Zhi Science&Technology Hunan Development Co.Ltd,Changsha Hunan 410007,China)

机构地区：[1]国防科技大学智能科学学院,湖南长沙410073 [2]唐智科技湖南发展有限公司,湖南长沙410007

出　　处：《传感技术学报》2022年第4期433-439,共7页Chinese Journal of Sensors and Actuators

摘　　要：轴承是旋转机械最易发生故障的零件,一旦发生故障,就会影响整个机械系统的运行,因此,对轴承的运行状态进行有效的监测意义重大。提出了一种基于蝶翼式MEMS振动传感器的轴承故障信号检测方法,具体介绍了蝶翼式MEMS振动传感器的设计、加工以及与之级联的电子谐振器的设计。仿真和应用验证表明,所提出的方法能够有效提取轴承故障信号。Bearings are the most fault-prone parts of rotating machinery.Once a fault occurs,it will affect the entire mechanical system.Therefore,it is of great significance to effectively monitor the condition of bearings.A bearing fault signal detection method is proposed based on butterfly MEMS vibration sensor,and the design and fabrication of the butterfly MEMS vibration sensor and the design of the electronic resonator are introduced.Simulation and application validation show that the method can effectively extract bearing fault signals.

关 键 词：MEMS振动传感器 轴承故障信号检测 电子谐振器 应用验证 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]