碳源浓度对MPCVD金刚石涂层的影响研究  

Preparation and Properties of MPCVD Diamond Coatings with Different Carbon Source Concentrations

作　　者：王天乐 刘义林 朱家诚 楼可旦 仇乐怡 杨涛 黄国波 WANG Tian-le;LIU Yi-lin;ZHU Jia-cheng;LOU Ke-dan;Chou Le-yi;YANG Tao;HUANG Guo-bo(School of Pharmaceutical and Materials Engineering,Taizhou University,Zhejiang Taizhou 318000;Taizhou Yunzhi Technology Company Limited,Zhejiang Taizhou 318000,China)

机构地区：[1]台州学院医药化工与材料工程学院,浙江台州318000 [2]台州耘智科技有限公司,浙江台州318000

出　　处：《广州化工》2022年第12期31-34,共4页GuangZhou Chemical Industry

基　　金：浙江省基础公益研究计划项目(No:LGC20E010003);浙江省教育厅一般科研项目(No:Y201738304);台州学院校立科研培育项目(No:2018PY030);浙江省重点研发计划项目(No:2020C04004)。

摘　　要：以CH_(4)和H_(2)为气源,采用微波等离子体化学气相沉积法(MPCVD),通过改变碳源浓度分别为5%、10%、15%,在硬质合金(YG6)上沉积了金刚石涂层样品。使用白光共聚焦显微镜、纳米压痕仪等研究了样品的微观形貌、表面粗糙度和弹性模量。结果表明:金刚石涂层表面光滑均匀,1 mm^(2)区域表面粗糙度约为2μm,随着甲烷浓度升高,薄膜弹性模量呈先升高后下降的趋势,其中10%甲烷浓度制备的样品平均弹性模量约为457.9 GPa。Diamond coating samples were deposited on cemented carbide(YG6)by microwave plasma chemical vapor deposition(MPCVD)with H_(2)and CH_(4)as gas sources.The microstructure,surface roughnes and elastic modulus of the samples were studied by using confocal microscope and nano Test.The results showed that the diamond coatings were smooth and uniform,and the surface roughness(Ra)were about 2μm in the regions of 1 mm^(2).With the increase of CH_(4)concentrations,the elastic modulus increased and then decreased.The elastic modulus of the sample prepared with 10%CH_(4)concentrations was about 457.9 GPa.

关 键 词：金刚石涂层 MPCVD 碳源浓度 性能 

分 类 号：TQ164[化学工程—高温制品工业]