一种毫米波调谐微带滤波器的研制  

Development of Millimeter-Wave Tunable Microstrip Bandpass Filter

作　　者：蔡喆 CAI Zhe(Southwest China Institute of Electronic Technology, Chengdu 610036, China)

机构地区：[1]中国西南电子技术研究所,四川成都610036

出　　处：《压电与声光》2022年第3期458-462,共5页Piezoelectrics & Acoustooptics

摘　　要：该文基于金丝键合工艺和薄膜工艺,实现了一种低插损、小型化毫米波调谐微带滤波器。首先提出了一种加载矩形孔的半波长开路可调谐振器,通过在不同矩形孔上键合金丝来改变谐振器的等效电感值,从而改变谐振频率。然后利用所提出的可调谐振器实现了一种Ka频段五阶调谐带通滤波器,通过改变键合金丝状态来调谐频率,实现仿真和实测结果之间的偏差修正,解决了在毫米波频段由于介电常数批次性差异以及加工误差等因素造成的窄带滤波器频率偏移的问题。为了验证其可行性,对五阶调谐微带滤波器进行仿真、优化、加工及测试。结果表明,该滤波器的通带可调范围为35.35~35.95 GHz,插入损耗小于4.6 dB,能够实现所需通带。Based on the gold wire bonding process and thin film process,a miniaturized millimeter-wave tunable microstrip filter with low insertion loss is realized in this paper.Firstly,a half-wavelength open circuit tunable resonator loaded with rectangular slots is proposed.The equivalent inductance of the resonator could be changed by bonding gold wires over different rectangular slots,so as to change the resonant frequency.Then,a Ka-band fifth-order tunable bandpass filter is realized by using the proposed tunable resonator,and the frequency is tuned by changing the state of bonded gold wires.Thereby the deviation between simulation and measured results could be corrected,which solves the problems of frequency shift of narrow-band filter caused by the factors of the differences in dielectric constant between batches and the machining errors.In order to verify the feasibility,a fifth-order tunable microstrip filter is simulated,optimized,fabricated and measured.The results show that the passband of the filter can be adjusted from 35.35 GHz to 35.95 GHz with insertion of loss less than 4.6 dB,and the required passband can be obtained.

关 键 词：调谐滤波器 毫米波 金丝键合 薄膜滤波器 

分 类 号：TN305[电子电信—物理电子学] TN713TN925