用于共封装光学的高功率连续波DFB激光器  

High-Power CW-DFB Laser for Co-Packaged Optics

作　　者：刘耀 黄永光 张瑞康[1,2] 刘祎慧 LIU Yao;HUANG Yongguang;ZHANG Ruikang;LIU Yihui(Henan Shijia Photons Technology Co.Ltd.,Hebi 458030,CHN;Key Lab.of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,CHN)

机构地区：[1]河南仕佳光子科技股份有限公司,河南鹤壁458030 [2]中国科学院半导体研究所半导体材料科学重点实验室,北京100083

出　　处：《半导体光电》2022年第2期267-272,共6页Semiconductor Optoelectronics

基　　金：国家重点研发计划项目(2018YFB2201500)。

摘　　要：为了应对共封装光学(CPO)系统对硅光外置光源提出的高功率、低噪声、低功耗等要求,设计了一种波长在1310 nm附近的AlGaInAs多量子阱(MQW)高功率连续波(CW)分布反馈(DFB)激光器芯片。通过在有源层MQW的下方插入一层InGaAsP远场减小层,实现光模场向n型包层下移,减小远场发散角的同时降低了量子阱区的光限制因子和整体的光吸收损耗,制作的激光器可以实现高斜率效率、非致冷高温高功率工作。测试结果显示,该激光器在25℃下,阈值电流为20 mA,斜率效率为0.46 W/A,输出功率为173 mW@400 mA;当注入电流为300 mA时,激光器的水平和竖直发散角分别是15.2°和19.1°,边模抑制比大于55 dB,洛伦兹线宽小于600 kHz,相对强度噪声(RIN)小于-155 dB/Hz;在85℃高温下,激光器阈值电流为32 mA,输出功率达到112 mW@400 mA。In order to meet the requirements of co-packaged optics(CPO)system,a multi-quantum well(MQW)continuous wave(CW)high-power distributed feedback(DFB)laser with high power,low noise and low loss is designed with the wavelength of 1310 nm.There is a specially optimized far-field reduction layer(FRL)below the MQW active layers to pull optical mode into the lower n-cladding layers.This design can reduce the internal loss of waveguide and the optical confinement factor.The fabricated DFB laser exhibits high slope efficiency and enables uncooled CW operation at high ambient temperatures.Test results indicate that the output power,threshold current and slope efficiency of the DFB laser are achieved to 173 mW@400 mA,20 mA and 0.46 mW/mA at 25℃,respectively.When the injection current is 300 mA,the far-field patterns divergence angle is 15.2°×19.1°,the sidemode suppression ratio(SMSR)is higher than 55 dB,the relative intensity noise(RIN)of laser is less than-155 dB/Hz,and the Lorentz linewidth is less than 600 kHz.The output power and the threshold current of the DFB are achieved to 112 mW@400 mA and 32 mA at 85℃,respectively.

关 键 词：共封装光学 连续波 多量子阱 ALGAINAS 分布反馈激光器 

分 类 号：TN248.4[电子电信—物理电子学]